Sb2O3 doped ZnO thin film was prepared by RF magnetron sputtering technique. The influence of Sb2O3 on the structure and the optical absorption of ZnO thin film was studied by XPS, XRD apparatuses and UV-Vis spectrophotometer. The results show that doped Sb2O3 has affected atomic and electronic structures, growth modes of crystal grains and optical absorption of ZnO. The element Sb exists in many forms in the film including transpositional atoms and compounds such as Sb2O3, Zn7Sb2O14 etc. ZnO crystal grains grow in mixing directions. The lattice relaxation and the content of second phases increase when more Sb is doped. The UVA absorption of doped ZnO thin film increases obviously. The ultraviolet absorption peak narrows, absorption intensity increases, the absorption margin becomes steep and moves to shorter wavelength of about 5 nm, and the visible absorption increases in some sort.
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