Preparation and Properties of Sapphire by Edge-defined Film-fed Growth (EFG) Method with Different Growth Directions
Shangjun Xu , Zhengjun Yao , Guangqing Pei , Xixi Luo , Xiaofeng Wu , Yuhua Lin
Journal of Wuhan University of Technology Materials Science Edition ›› 2018, Vol. 33 ›› Issue (5) : 1022 -1027.
Preparation and Properties of Sapphire by Edge-defined Film-fed Growth (EFG) Method with Different Growth Directions
Sapphire, belonging to hexagonal crystal system, is typically anisotropic which makes it direction-sensitive. To research the effects of growth directions on properties of sapphire, c-[0001] seed (c-sapphire) and a-[11-20] seed (a-sapphire) were used to prepare sapphire by edge-defined film-fed growth (EFG) method. The samples were analyzed through lattice integrity, dislocation and corrosion performance by double-crystal XRD, OM, AFM, SEM and EDX. It was shown that the lattice integrities of two growth-direction crystals were both well due to the small FWHM values. While the average densities of dislocation in c-sapphire and a-sapphire were 9.2×103 and 3.9×103 cm-2 respectively, the energy of dislocation in c-sapphire was lower than that in a-sapphire. During Strong Phosphoric Acid (SPA) etching, the surface of c-sapphire basically kept smooth but in a-sapphire there were many point-like corrosion pits where aluminum and oxygen atoms lost by 2:1. Our work means that it will be promising for growing c-[0001] seed sapphire by EFG if aided by parameter optimization.
sapphire / growth direction / edge-defined film-fed growth
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| [4] |
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| [5] |
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| [6] |
|
| [7] |
|
| [8] |
|
| [9] |
|
| [10] |
|
| [11] |
|
| [12] |
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| [13] |
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| [14] |
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| [15] |
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| [16] |
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| [17] |
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