Effect of deposition time on microstructures and growth behavior of ZrC coatings prepared by low pressure chemical vapor deposition with the Br₂-Zr-C₃H₆-H₂-Ar System

Abstract

ZrC coatings were deposited on graphite substrates by low pressure chemical vapor deposition (LPCVD) with the Br₂-Zr-C₃H₆-H₂-Ar system. The effects of deposition time on the microstructures and growth behavior of ZrC coatings were investigated. ZrC coating grew in an island-layer mode. The formation of coating was dominated by the nucleation of ZrC in the initial 20 minutes, and the rapid nucleation generated a fine-grained structure of ZrC coating. When the deposition time was over 30 min, the growth of coating was dominated by that of crystals, giving a column-arranged structure. Energy dispersive X-ray spectroscopy showed that the molar ratio of carbon to zirconium was near 1:1 in ZrC coating, and X-ray photoelectron spectroscopy showed that ZrC was the main phase in coatings, accompanied by about 2.5mol% ZrO₂ minor phase.

Keywords

ZrC / ultra-high temperature ceramic / microstructures / growth behaviors / chemical vapor deposition

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