Effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films

Hongyu An; Takashi Harumoto; Takumi Sannomiya; Shinji Muraishi; Rong Tu; Lianmeng Zhang; Yoshio Nakamura; Ji Shi

doi:10.1007/s11595-016-1327-6

Journal of Wuhan University of Technology Materials Science Edition ›› 2016, Vol. 31 ›› Issue (1) : 44 -47. DOI: 10.1007/s11595-016-1327-6

Advanced Films and Coatings

Effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films

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Abstract

The effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films has been investigated. The crystallinity of CoPt has been improved with increasing substrate temperature from room temperature to 400 °C. After post-annealing process, L1₀ CoPt structure transformation has also been promoted. However, since the easy magnetic axis of L1₀ CoPt is in [001] orientation, the promotion of L1₀ CoPt transformation causes the change of easy magnetic axis in (111) textured CoPt layers, which impairs the perpendicular magnetic anisotropy. The optimum substrate temperature should be room temperature to obtain the strongest perpendicular magnetic anisotropy according to the results of the present work.

Keywords

CoPt/AlN / post-annealing / crystallinity / magnetic anisotropy

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Hongyu An, Takashi Harumoto, Takumi Sannomiya, Shinji Muraishi, Rong Tu, Lianmeng Zhang, Yoshio Nakamura, Ji Shi. Effect of substrate temperature on the structure and magnetic properties of CoPt/AlN multilayer films. Journal of Wuhan University of Technology Materials Science Edition, 2016, 31(1): 44-47 DOI:10.1007/s11595-016-1327-6

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