A review: Structural oxide coatings by laser chemical vapor deposition

Abstract

Yttria-stabilized zirconia and α-alumina films were prepared by laser chemical vapor deposition at deposition rates of several hundred micrometers per hour. Moreover, the structural oxide coatings by laser chemical vapor deposition are reviewed. The laser can significantly accelerate the chemical reaction and grain growth in CVD, yielding high deposition rates. The films contain large amounts of nanopores that act as thermal insulation and are thus promising as coating materials for gas turbine blades of Ni-based superalloys and WC-Co cutting tools.

Keywords

laser CVD / yttria-stabilized zirconia / alumina / plasma / nano-pores

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