Improved visible transparency of SIO₂/ZNO:AL /CEO₂-TIO₂/SIO₂ multilayer films with high UV absorption and infrared reflection rate

Abstract

New visible transparent, UV absorption, and high infrared reflection properties have been realized by depositing multilayer SiO₂/ZnO: Al/CeO₂-TiO₂/SiO₂ films onto glass substrates at low temperature by radio frequency magnetron sputtering. Optimum thickness of SiO₂, ZnO: Al (ZAO) and CeO₂-TiO₂ (CTO) films were designed with the aid of thin film design software. The degree of antireflection can be controlled by adjusting the thickness and refractive index. The outer SiO₂ film can diminish the interference coloring and increase the transparency; the inner SiO₂ film improves the adhesion of the coating on the glass substrate and prevents Ca²⁺, Na⁺ in the glass substrate from entering the ZAO film. The average transmittance in the visible light range increases by nearly 18%-20%, as compared to double layer ZAO/CTO films. And the films display high infrared reflection rate of above 75% in the wavelength range of 10-25 μm and good UV absorption (> 98%) properties. These systems are easy to produce on a large scale at low cost and exhibit high mechanical and chemical durability. The triple functional films with high UV absorption, antireflective and high infrared reflection rate will adapt to application in flat panel display and architectural coating glass, automotive glass, with diminishing light pollution as well as decreasing eye fatigue and increasing comfort.

Keywords

SiO₂/ZnO:Al /CeO₂-TiO₂/SiO₂ / transparency / high infrared reflection rate / ultraviolet absorption / optimization

References

[1] Mazur M, Wojcieszak D, Domaradzki J, et al. TiO₂/SiO₂ Multilayer as an Antireflective and Protective Coating Deposited by Microwave Assisted Magnetron Sputtering[J]. Opto-Electron. Rev., 2013, 21(2): 233-238.

[2] Zhao X J, Zhao Q N, Yu J G, et al. Development of Multifunctional Photoactive Self-cleaning Glasses[J]. J. Non-Cryst. Solids, 2008, 354(12-13): 1424-1430.

[3] Asghar M H, Placido F, Naseem S. Reactively Evaporated Multilayer Antireflection Coatings for Ge Optical Window[J]. J. Phys. D-Appl. Phys., 2007, 40: 2065-2070.

[4] Sainz M A D, n A F, Navarro J M. UV Highly Absorption Coating with CeO₂ and TiO₂[J]. J. Non-Cryst. Solids, 1990, 12(3): 315-318.

[5] Makishima A, Kubo H, Wada K. Yellow Coatings Produced on Glasses and Aluminum by the Sol-Gel Process[J]. Ceram. Soc., 1986, 69: 127-129.

[6] Ni J M, Zhao X J, Zhao Q N. Effect of Heat-treatment on Crystalline Phase and UV Absorption of 60CeO₂-40TiO₂ Thin Films by Magnetron Sputtering[J]. Journal of Wuhan University of Technology-Mater. Sci. Ed., 2012, 27(5): 881-885.

[7] Zhao Q N, Dong Y H. Double Functional Coating Glass of Antireflective Visible Light and Reflective Near-infrared [J]. J. Materials Science and Engineering, 2012, 30(1): 5-8.

[8] Zhao Q N, Dong Y H, Ni J M, et al. Preparation and Characterization of CeO₂-TiO₂/SnO₂: Sb Films Deposited on Glass Substrates ">by^R.F. Sputtering[J]. Journal of Wuhan University of Technology-Mater. Sci. Ed., 2008, 23(4): 443-447.

[9] Wiktorczyk T, Oles M D. Fabrication and Optical Characterization of Cerium Oxide-magnesium Fluoride Double Layer Antireflection Coatings on Monocrystalline SiliconSubstrates [J]. Optical Materials, 2006, 29(12): 1768-1773.

[10] Martinet C, Pillard V, Gagnaire A, et al. Deposition of SiO₂ and TiO₂ Thin Films by Plasma Enhanced Chemical Vapor Deposition for Antireflection Coating [J]. Non-Cryst. Solids, 1997, 216: 77-82.

[11] Ni J M, Zhao Q N, Zhao X J. Design and Fabrication of Multilayer SiO₂/CeO₂-TiO₂/SiO₂ Coatings with UV Absorption and High Quality Transparence Properties[J]. Chinese Journal of Lasers, 2009, 36(s1): 324-329.

[12] Takeshi M, Hiroyuki T, Akemi M. Ultraviolet Ray Absorbing Coatings on Glass for Automobiles[J]. Thin Solid Films, 1999, 351: 61-65.

[13] Ni J M, Zhao Q N, Zhao X J. Transparent and High Infrared Reflection Film Having Sandwich Structure of SiO₂/Al:ZnO/SiO₂[J]. Progress in Organic Coatings, 2009, 64(2): 317-321.

[14] Lei M, Li F S, Sakae T. Cost-effective Nanoporous SiO₂-TiO₂ Coatings on Glass Substrates with Antire?ective and Self-cleaning Properties[J]. Applied Energy, 2013, 112: 1198-1205.

[15] Ye L Q, Zhang Y L, Zhang X X. Sol-gel Preparation of SiO₂/TiO₂/SiO₂- TiO₂ Broadband Antire?ective Coating for Solar Cell Cover Glass[J]. Solar Energy Materials & Solar Cells, 2013, 111: 160-164.

[16] Li Z, Wang Z, Zhao D. Optimization of Optical Properties of ZAO/ metal/ZAO Multilayers [J]. Mater. Sci. Eng., 2004, 22(4): 495-497.

[17] Tang J, Zheng Q. Applied Film Optical [M], 1984 Shanghai: Shanghai Science and Technology Press.

[18] Liu Y, Wang C, Diao X G, et al. Optimization of the Thickness of Glass/TiO₂/Ag/Ti/TiO₂/SiON Multilayer Film [J]. Vacuum, 2012, 86: 2040-2043.

[19] Macleod H A. Thin-film Optical Filters. 3rd ed[M], 2001 Bristol: Institute of Physics Publishing.

[20] Qiu Shikeji. MatLab 7.0 from Approach to Conversance [M], 2006 Beijing: People Post Telephone and Telegraph Press.

[21] Frank G, Kauer E, Kostlin H. Transparent Heat-reflecting Coatings Based on Highly Doped Semiconductors[J]. Thin Solid Films, 1981, 77(1-3): 107-118.