Enhanced photocatalytic activity of C-TiO₂ thin films prepared by magnetron sputtering and post-carbon ion implantation

Abstract

TiO₂ thin films were fabricated by RF magnetron sputtering on titanium substrates and then implanted with different amounts of carbon. The microstructure, valence states and optical characteristics of each sample were investigated by X-ray diffraction, X-ray photoelectron spectroscopy and UV-vis diffuse reflection spectroscopy. Photoelectric property was evaluated under visible light using a xenon lamp as illuminant. The experimental results indicate that the implanting carbon concentration has a significant influence on film’s micro structure and element valence states. The dominant valence states of carbon vary as carbon content increases. Carbon ion implantation remarkably enhances the current density and photocatalytic capability of TiO₂ thin films. The optimized implanting content is 9.83×10¹⁷ ion/cm², which gives rise to a 150% increased photocurrent and degradation rate.

Keywords

carbon / ion implantation / photocurrent / photocatalytic activity

References

[1] Engqvist J, Jansson U Initial Stages of Growth During CVD of W on TiSi₂ Substrates[J]. Thin Solid Films, 1995, 263: 54-64.

[2] Shi JY, Leng WH, Zhu WC, . Electrochemically Assisted Photocatalytic Oxidation of Nitrite over Cr-Doped TiO₂ under Visible Light[J]. Chem. Eng. Technol., 2006, 29: 146-154.

[3] Zhang XW, Lei LC One Step Preparation of Visible-light Responsive Fe-TiO₂ Coating Photocatalysts by MOCVD[J]. Mater. Lett., 2008, 62: 895-897.

[4] Luo SY, Yan BX, Shen J Enhancement of Photoelectronic and Photocatalytic Activities: Mo Doped TiO₂ Thin Films Deposited by Sputtering [J]. Thin Solid Films, 2012, 552: 361-365.

[5] Dozzi MV, Livraghi S, Giamello E, . Photocatalytic Activity of S- and F-doped TiO₂ in Formic Acid Mineralization[J]. Photochem. Photobiol. Sci., 2011, 10: 343-349.

[6] Ho WK, Yu JC, Lee SC Synthesis of Hierarchical Nanoporous F-doped TiO₂ Spheres with Visible Light Photocatalytic Activity[J]. Chem. Commun., 2006, 10: 1115-1117.

[7] Zhu L, Xie JS, Cui XL, . Photoelectrochemical and Optical Properties of N-doped TiO₂ Thin Films Prepared by Oxidation of Sputtered TiNx Films[J]. Vacuum, 2010, 84: 797-802.

[8] Asahi R, Morikawa T, Ohwaki T, . Visible-Light Photocatalysis in Nitrogen-Doped Titanium Oxides[J]. Science, 2001, 293: 269-271.

[9] Sakthivel S, Kisch H Daylight Photocatalysis by Carbon-Modified Titanium Dioxide[J]. Angew. Chem. Int. Ed., 2003, 42: 4 908-4 911.

[10] Park JH, Kim SW, Bard AJ Novel Carbon-Doped TiO₂ Nanotube Arrays with High Aspect Ratios for Efficient Solar Water Splitting[J]. Nano. Lett., 2006, 6: 24-28.

[11] Li HY, Wang DJ, Fan HM, . Synthesis of Highly Efficient C-doped TiO₂ Photocatalyst and Its Photo-generated Charge-transfer Properties[J]. J. Colloid. Interface. Sci., 2011, 354: 175-180.

[12] Choi Y, Umebayashi T, Yoshikawa M Fabrication and Characterization of C-doped Anatase TiO₂ Photocatalysts[J]. J. Mater. Sci., 2004, 39: 1837-1839.

[13] Kang IC, Zhang QW, Yin S, . Preparation of a Visible Sensitive Carbon Doped TiO₂ Photo-catalyst by Grinding TiO₂ with Ethanol and Heating Treatment[J]. Appl. Catal., B, 2008, 80: 81-87.

[14] Liu G, Wang LZ, Yang HG, . Titania-based Photocatalysts-crystal Growth, Doping and Heterostructuring[J]. J. Mater. Chem., 2010, 20: 831-843.

[15] Shen XJ, Zhang JL, Tian BZ, . Tartaric Acid-assisted Preparation and Photocatalytic Performance of Titania Nanoparticles with Controllable Phases of Anatase and Brookite[J]. J. Mater. Sci., 2012, 47: 5 743-5 751.

[16] Noworyta K, Augustynski J Spectral Photoresponses of Carbon-Doped TiO₂ Film Electrodes[J]. Electrochem. Solid-State Lett., 2004, 7: E31-E33.

[17] Chu PK Recent Developments and Applications of Plasma Immersion Ion Implantation[J]. J. Vac. Sci. Technol., B, 2004, 22: 289-296.

[18] Shukur HA, Sato M, Nakamura I, . Characteristics and Photocatalytic Properties of TiO₂ Thin Film Prepared by Sputter Deposition and Post-N+ Ion Implantation[J]. Adv. Mater. Sci. Eng., 2012, 2012: 923 769-923 775.

[19] Valentin CD, Pacchioni G, Selloni A Theory of Carbon Doping of Titanium Dioxide[J]. Chem. Mater., 2005, 17: 6 656-6 665.

[20] Jia F, Yao ZP, Jiang ZH, . Preparation of Carbon Coated TiO₂ Nanotubes film and Its Catalytic Application for H₂ Generation[J]. Catal. Commun., 2011, 12: 497-501.

[21] Jribi R, Barthel E, Bluhm H, . Ultraviolet Irradiation Suppresses Adhesion on TiO₂[J]. J. Phys. Chem. C, 2009, 113: 8 273-8 277.

[22] Cheng G, Akhtar MS, Yang OB, . Novel Preparation of Anatase TiO₂@Reduced Graphene Oxide Hybrids for High-Performance Dye-Sensitized Solar Cells[J]. ACS Appl. Mater. Interfaces, 2013, 5(14): 6 635-6 642.

[23] Cong Y, Li X, Qin Y, . Carbon-doped TiO₂ Coating on Multiwalled Carbon Nanotubes with Higher Visiblelight Photocatalytic Activity[J]. Appl. Catal., B, 2011, 107: 128-134.

[24] Wang XX, Meng S, Zhang X, . Multi-type Carbon Doping of TiO₂ Photocatalyst[J]. Chem. Phys. Lett., 2007, 444: 292-296.

[25] Xu Z, Shang J, Liu CM, . The Preparation and Characterization of TiO₂ Ultrafine Particles[J]. Mater. Sci. Eng., B, 1999, 56: 211-214.

[26] Huang BS, Tseng HH, Wey MY Comparison of Visible-light-driven Routes of Anion-doped TiO₂ and Composite Photocatalyst[J]. J. Ceram. Soc. Jpn., 2009, 117: 753-758.

[27] Chen LC, Ho YC, Guo WS, . Enhanced Visible Light-induced Photoelectrocatalytic Degradation of Phenol by Carbon Nanotubedoped TiO₂ Electrodes[J]. Electrochim. Acta., 2009, 54: 3 884-3 891.

[28] Chestnoy N, Harris TD, Hull R Luminescence and Photophysics of Cadmium Sulfide Semiconductor Clusters: the Nature of the Emitting Electronic State[J]. J. Phys. Chem., 1986, 90: 3393-3399.