Effect of heat-treatment on crystalline phase and UV absorption of 60CeO₂-40TiO₂ thin films by magnetron sputtering

Abstract

60CeO₂-40TiO₂ thin films were deposited on soda-lime silicate glass substrates by R.F. magnetron sputtering. The effects of heat-treatment on the UV-absorption of the thin films were studied on the 60CeO₂-40TiO₂ thin film with the largest UV cut-off wavelength. The sample films with CeO₂:TiO₂=60:40 were heated at 773 K, 873 K, 973 K for 30 min. These films are characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), and X-ray photoelectron spectroscopy and spectrometer (XPS). XRD analysis proves that the addition of TiO₂ to CeO₂ changed the crystalline state of CeO₂. But the UV absorption effect of CeO₂-TiO₂ films with CeO₂ crystallite phase is inferior to that of the amorphous phase CeO₂-TiO₂ films. XPS analysis also indicates that the amorphous phase CeO₂-TiO₂ films have the most Ce³⁺ content in these films. Amorphous phase and crystalline phase of the CeO₂-TiO₂ films have different effects on UV absorption of the thin films.

Keywords

CeO₂-TiO₂ thin films / UV absorption / CeO₂ crystallite phase / radio frequency magnetron sputtering

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