Sputtering preparation and magneto-optical properties of GdTbFeCo thin films

Abstract

Amorphous GdTbFeCo magnetic thin films were successfully prepared on glass substrates by RF magnetron sputtering system from a mosaic target. The influences of sputtering parameters on the magnetooptical properties GdTbFeCo thin film were investigated by the variable control method. And the influence mechanism was analyzed in detail. After the sputtering parameters were optimized, it was found that when the distance between target and substrate was 72 mm, the thin film thickness was 120 nm, and the sputtering power, sputtering pressure and sputtering time was 75 W, 0.5 Pa and 613 s, respectively, the coercivity with perpendicular anisotropy could be as high as 6735 Oe, and the squareness ratio of the hysteresis loop was almost equal to 1.

Keywords

influence / magnetron sputtering parameters / GdTbFeCo thin film / magneto-optical property / variable control method

References

[1] Rahman M. T., Liu X. X., Morisako A. TiN Underlayer and Overlayer for TbFeCo Perpendicular Magnetic Recording Media[J]. J. Magn. Magn. Mater., 2006, 303: 133-136.

[2] Nagata K., Kawakubo Y., Kato D. Durability of Thermally Assisted Magnetic Recording Disk[J]. IEEE Trans. Magn., 2002, 38(3): 1 332-1 334.

[3] Rahman T., Liu X., Morisako A., Matsumoto M. TbFeCo Film with W Underlayer and Overlayer for Perpendicular Magnetic Recording [J]. J. Magn. Magn. Mater., 2005, 287: 250-254.

[4] Ota N., Sekine M., . Hybrid Recording Capability Toward Tera bit/ in²[J]. IEEE Trans. Magn., 2002, 38(1): 156-158.

[5] Hohfeld J., Gerris T., Biderbeek M., . Femtosecond Laser Pulse Iduced Magnetization Reversal[J]. J. Magn. Soc. Japan, 2001, 25: 202-205.

[6] Kenneth E. J. Magnetic Mmaterials and Structures for Thin-film Recording Media [J]. J. Appl. Phys., 2000, 87(9): 5 365-5 370.

[7] Sukeda H., Saga H., Nemoto H., . Thermally Assited Magnetic Recording on Flux Detecable RE-TM media [J]. IEEE Trans. Magn., 2001, 37(4): 1 234-1 238.

[8] Laughlin E. D. The Crystallography and Texture of Co-based Thin Film Deposited on Cr Underlyers[J]. IEEE T-MAG, 1991, 27(6): 4 713-4 717.

[9] Futamoto M., Inaba N., Hirayama Y., Honda K. Y. Microstructure and Micromagnetics of Future Thin-Film Media[J]. J. Magn. Magn. Mater., 1999, 193: 36-43.

[10] Schabes E. M., Fullerton E., Margulies T. D. Theory of Antiferromagnetically Coupled Magnetic Recording Media [J]. IEEE Trans. Magn., 2001, 37(4): 1 432-1 434.

[11] Ota N., Sekine M., Awano H., . Capability of Tera bps Ultrafast Rewritable Storage by Thermomagnetic Switching[J]. Jpn. J. Appl. Phys., 2002, 41: 1 650-1 653.