Preparation of MgO films as buffer layers by laser-ablation at various substrate temperatures

Abstract

MgO thin films were deposited on Si(100) substrates by laser ablation under various substrate temperatures (T _sub), expecting to provide a candidate buffer layer for the textured growth of functional perovskite oxide films on Si substrates. The effect of T _sub on the preferred orientation, crystallinity and surface morphology of the films was investigated. MgO films in single-phase were obtained at 473–973 K. With increasing T _sub, the preferred orientation of the films changed from (200) to (111). The crystallinity and surface morphology was different too, depending on T _sub. At T _sub=673 K, the MgO film became uniform and smooth, exhibiting high crystallinity and a dense texture.

Keywords

MgO films / buffer layer / laser ablation / substrate temperature

References

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