The growth of carbon nanotube with chemical vapor deposition under different process parameters

Abstract

Whether the active catalytic species are in a liquid, solid phase, surface premelting or surface processes during CNT or other nanowire growth are controversial. In order to explore the mechanism for catalytically grown carbon nanotube (CNT), the mechanism for CNT grown under different temperatures was proposed tentatively. With ethanol chemical vapor deposition (CVD), carbon n.anotubes (CNTs) were synthesized controllably on Si substrates using cobalt (Co) as a catalyst. The effects of the Co particle size, growth temperature and ethanol pressure on CNT growth were investigated. A different dependence of CNT growth on the Co particle size at different ranges of the growth temperature was found.

Keywords

carbon nanotube / chemical vapor deposition / Raman spectra

References

[1] Wang B. B., Gu C. Z., Dou Y., . Effects of N₂ and Glow Discharge on Growth Behaviours of Carbon Nanotubes Prepared by the Hot Filament Chemical Vapour Deposition Method[J]. Chin. Phys., 2003, 12(12): 1459-1465.

[2] Cantoro M., Hofmann S., Pisana S., . Catalytic Chemical Vapor Deposition of Sing-Wall Carbon Nanotubes at Low Temperatures[J]. Nano Lett., 2006, 6(6): 1107-1112.

[3] Harutyunyana A. R., Tokune T. Liquid as a Required Carbon Phase for Carbon Single-walled Nanotube Growth[J]. Appl. Phys. Lett., 2005, 87(5): 051919-1-3.

[4] Sakai H. Surface-Induced Melting of Small Particles[J]. Surface Science, 1996, 315(1–3): 285-291.

[5] Kodambaka S., Tersoff J., Reuter M. C., . Germanium Nanowire Growth below the Eutectic Temperature[J]. Science, 2007, 316(5825): 729-732.

[6] Dresselhaus M. S., Dresselhaus G., Saito R., . Raman Spectroscopy of Carbon Nanotubes[J]. Phys. Rep., 2005, 409(2): 47-99.

[7] Wagner R. S., Ellis W. C. Vapor-Liquid-Solid Mechanism of Single Crystal Growth[J]. Appl. Phys. Lett., 1964, 4(5): 89-90.

[8] Gavillet J., Loiseau A., Journet C., . Root-Growth Mechanism for Single-Wall Carbon Nanotubes[J]. Phys. Rev. Lett., 2001, 87(27): 275504

[9] Kanzow H., Ding A. Formation Mechanism of Single-Wall Carbon Nanotubes on Liquid-Metal Particles [J]. Phys. Rev. B, 1999, 60(15): 11180-11186.

[10] Klinke C., Bonard J. M., Kern K. Thermodynamic Calculations on the Catalytic Growth of Multiwall Carbon Nanotubes[J]. Phys. Rev. B, 2005, 71(3): 035403

[11] Harutyunyana A. R., Tokune T. Liquid as a Required Catalyst Phase for Carbon Single-walled Nanotube Groweh[J]. Appl. Phys. Lett., 2005, 87(5): 051919

[12] Sawada S., Hamada N. Energetics of Carbon Nanotubes[J]. Solid State Commun., 1992, 83(11): 917-919.

[13] Lucas A. A., Lambin P. H., Smalley R. E. On the Energetics of Tubular Fullerenes[J]. J. Phys. Chem. Solids, 1993, 54(5): 587-593.

[14] Dai H., Rinzler A. G., Nikolaev P., Thess A., Colbert D. T., . Single-wall Nanotubes Produced by Metal-catalyzed Disproportionation of Carbon Monoxide [J]. Chem. Phys. Lett., 1996, 260(3–4): 471-475.

[15] Sinnott S. B., Andrews R., Qian D., . Model of Carbon Nanotube Growth through Chemical Vapor Deposition[J]. Chem.Phys. Lett., 1999, 315(1–2): 25-30.

[16] Zhao Y. L., Seko K., Saito Y. Effects of Process Parameters and Substrate Structures on Growth of Single-walled Carbon Nanotubes by Catalytic Decomposition of Ethanol[J]. Jap. J.of Appl., 2006, 45(8A): 6508-6512.