Structure and performance of TiC-containing diamond-like carbon nanocomposite coatings deposited by rectangular cathodic arc ion-plating

Abstract

TiC-containing diamond-like carbon (TiC-DLC) nanocomposite coatings were deposited by a rectangular cathodic arc ion-plating system using C₂H₂ as reacting gas. Raman spectroscopy and transmission electron microscopy analysis show that with increasing flow rate of C₂H₂, the structure of nanocomposite coatings changes from TiC nanograin-containing to graphite nanograin-containing DLC. The hardness measurements show that the hardness decreases from 28 GPa to 18 GPa with increasing C₂H₂ flow rate. The scratch test show that a high critical load (>40 N) was obtained and exhibited a good adhesion between the coating and the substrate. Wear experiment shows that the friction coefficient of TiC-DLC nanocomposite coatings decreases with increasing C₂H₂. A low friction coefficient of 0.07 was obtained at 480 sccm C₂H₂.

Keywords

diamond-like carbon / rectangular cathodic arc / nanocomposite coating / hardness / tribological properties

References

[1] Voevodin A. A., Zabinski J. S. Superhard, Functionally Gradient, Nanolayered and Nanocomposite Diamond-like Carbon Coatings for Wear Protection[J]. Diam. Relat. Mater., 1998, 2–5: 463

[2] Holubar P., Jilek M., Sima M. Present and Possible Future Applications of Superhard Nanocomposite Coatings[J]. Surf. Coat. Technol., 2000, 133–134: 145

[3] Zhang S., Sun D., Fu Y. Q., . Recent Advances of Superhard Nanocomposite Coatings: a Review[J]. Surf & Coat. Technol., 2003, 167: 113

[4] Liepack H., Bartsch K., Arnold B., . Characteristics of Excess Carbon in PACVD TiC-amorphous Carbon Layers[J]. Diam. Relat. Mater., 2004, 13: 106

[5] Karpov D. A. Cathodic Arc Sources and Macroparticle Filtering[ J]. Surf & Coat. Technol., 1997, 96: 22

[6] Raymond L. B. Principles and Applications of Vacuum Arc Coatings[J]. IEEE Trans. Plasma Sci., 1989, 17: 705

[7] Shi X., Tay B. K., Flynn D. I., . Characterization of Filtered Cathodic Vacuum Arc System[J]. Surf. Coat. Technol., 1997, 94–95: 195

[8] Siemroth P., Schulke T., Witke T. Investigation of Cathode Spots and Plasma Formation of Vacuum Arcs by High Speed Microscopy and Spectroscopy[J]. IEEE Trans. Plasma Sci., 1999, 25: 571

[9] Miernik K., Walkowicz J., Bujak J. Design and Performance of the Microdroplet Filtering System Used in Cathodic Arc Coating Deposition[J]. Plasmas Ions, 2000, 3: 41

[10] Harris S. G., Doyle E. D., Wong Y. C., . Reducing the Macroparticle Content of Cathodic Arc Evaporated TiN Coatings[J]. Surf. Coat. Technol., 2004, 183: 283

[11] Zhang S., Zeng X. T., Xie H., . A Phenomenological Approach for the I _d/I _g Ratio and sp ³ Fraction of Magnetron Sputtered a-C films[J]. Surf. Coat. Technol., 2000, 123: 256

[12] Dresselhaus M. S., Dresseljaus G., Eklund P. C. Science of Fullerenes and Carbon Nanotubes[M], 1996 London Academic Press

[13] Ferrari A. C., Robertson J. Raman Spectroscopy of Amorphous, Nanostructured, Diamond-like Carbon, and Nanodiamond[J]. Philos. Trans. R. Soc., 2004, A362: 2 267

[14] Casiraghi C, Ferrari A C, Robertson J Raman Spectroscopy of Hydrogenated Amorphous Carbons[J]. Phys. Rev. B., 2005, 72: 085401

[15] Lin-Vien D., Colthurp N. B., Fateley W. G., . Handbook of Infrared and Raman Characteristic Frequencies of Organic Molecules[M], 1991 New York Academic

[16] Ristein J., Stief R. T., Ley L., . A Comparative Analysis of a-C:H by Infrared Spectroscopy and Mass Selected Thermal Effusion[J]. J. Appl. Phys., 1998, 84: 3 836