Thermodynamic analysis of the preparation process of EB-PVD SiC coating

Abstract

The process of preparing SiC coating by electron beam-physical vapor deposition (EB-PVD) was discussed from viewpoint of thermodynamis. Results show that within the temperature range of 2 700–3 300 K, the ratio of SiC in the SiC coating doesn’t change much and keeps around 0.7. Purity of the as-deposited SiC coating is not high. To improve the purity of the SiC coating, the SiC ingot is required to not be, necessary in full density but be fine-grained.

Keywords

thermodynamics / SiC coating / EB-PVD / ratio of SiC / purity

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