Preparation and characterization of CeO₂-TiO₂/SnO₂:Sb films deposited on glass substrates by R.F. sputtering

Abstract

CeO₂-TiO₂ films and CeO₂-TiO₂/SnO₂:Sb (6 mol%) double films were deposited on glass substrates by radio-frequency magnetron sputtering (R.F. Sputtering), using SnO₂:Sb(6 mol%) target, and CeO₂-TiO₂ targets with different molar ratio of CeO₂ to TiO₂ (CeO₂:TiO₂=0:1.0; 0.1:0.9; 0.2:0.8; 0.3:0.7; 0.4:0.6; 0.5:0.5; 0.6:0.4; 0.7:0.3; 0.8:0.2; 0.9:0.1; 1.0:0). The films are characterized by UV-visible transmission and infrared reflection spectra, scanning electron microscopy (SEM), Raman spectroscopy, X-ray photoelectron spectroscopy (XPS) and X-ray diffraction (XRD), respectively. The obtained results show that the amorphous phases composed of CeO₂-TiO₂ play an important role in absorbing UV, there are Ce³⁺, Ce⁴⁺ and Ti⁴⁺ on the surface of the films; the glass substrates coated with CeO₂-TiO₂ (Ce/Ti=0.5:0.5; 0.6:0.4)/SnO₂:Sb(6 mol%) double films show high absorbing UV(>99), high visible light transmission (75%) and good infrared reflection (>70%). The sheet resistance of the films is 30–50 Ω/∟. The glass substrates coated with the double functional films can be used as window glass of buildings, automobile and so on.

Keywords

coating glass / CeO₂-TiO₂/SnO₂:Sb double thin films / absorbing UV / IR reflection / R.F. sputterin

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