Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications

Xin Li; Zhen-an Tang; Xin-lu Deng; Yu-xiu Shen; Hai-tao Ding

doi:10.1007/BF03000166

Journal of Wuhan University of Technology Materials Science Edition ›› 2004, Vol. 19 ›› Issue (2) : 44 -47. DOI: 10.1007/BF03000166

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Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications

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Abstract

Diamond-like carbon (DLC) films have recently been pursued as the protection of MEMS against their friction and wear. Plasma enhanced chemical vapor deposition (PECVD) technique is very attractive to prepare DLC coating for MEMS. This paper describes the preparation of DLC films using twinned electron cyclotron resonance (ECR) microwave PECVD process. Raman spectra confirmed the DLC characteristics of the films. Fourier-transform infrared (FT-IR) characterization indicates the carbon is bonded in the form sp³ and sp² with hydrogen participating in bonding. The surface roughness of the films is as low as approximately 0.093 nm measured with an atomic force microscope. A CERT microtribometer system is employed to obtain information about the scratch resistance, friction properties, and sliding wear resistance of the films. The results show the deposited DLC films have low friction and good scratch/ wear resistance properties.

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DLC films / ECR-MPECVD / MEMS

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Xin Li, Zhen-an Tang, Xin-lu Deng, Yu-xiu Shen, Hai-tao Ding. Preparation and characterization of DLC films by twinned ECR microwave plasma enhanced CVD for microelectromechanical systems (MEMS) applications. Journal of Wuhan University of Technology Materials Science Edition, 2004, 19(2): 44-47 DOI:10.1007/BF03000166

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