Microstructure and the corrosion resistance of SiC reinforced pyrolytic graphite coating under physical vapor transport SiC environment

Abstract

In order to effectively prevent the contamination of carbon particle volatiles during high-purity SiC crystals are prepared using the physical vapor transport (PVT) method in ultra-high temperature environments (T≥2000 °C), this study innovatively attempts to protect graphite materials with SiC reinforced pyrolytic graphite (PyG) coating. It is discovered by preparing the SiC particle layer, the degree of graphitization and stability of PyG coating can be improved. The corrosion test results demonstrated that the SiC reinforced PyG coating can maintain an intact coating with a high graphitization degree after the SiC vapour corrosion test of 2050 °C-120 h. Conversely, the samples with and without PyG coating reveal porous and eroded surfaces. Furthermore, following the SiC vapour corrosion test, the PyG coating sample’s integral ratio of D-band and G-band (I_D/I_G) of Raman spectrum test data, reduced by 6.5%, while the SiC reinforced PyG coating decreased by 17.2%, indicating its excellent corrosion resistance. The application of SiC reinforced pyrolytic graphite coating in preparing the SiC single crystal might received a theoretical foundation according to this work.

Keywords

pyrolytic graphite / silicon carbide / chemical vapour reaction / high-temperature chemical vapour deposition / SiC crystal growth / corrosion resistance

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Central South University