Femtosecond laser modulated into Bessel beam by spatial light modulator for Fresnel zone plate processing

Abstract

Femtosecond laser processing is an important machining method for micro-optical components such as Fresnel zone plate (FZP). However, the low processing efficiency of the femtosecond laser restricts its application. Here, a femtosecond laser Bessel beam is proposed to process micro-FZP, which is modulated from a Gaussian beam to a Bessel annular beam. The processing time for FZP with an outer diameter of 60 µm is reduced from 30 min to 1.5 min on an important semiconductor material gallium arsenide (GaAs), which significantly improves the processing efficiency. In the modulation process, a central ablation hole that has an adverse effect on the diffraction performance is produced, and the adverse effect is eliminated by superimposing the blazed grating hologram. Meanwhile, the FZP machined by spatial light modulator (SLM) has good morphology and higher diffraction efficiency, which provides a strong guarantee for the application of micro-FZP in computed tomography and solar photovoltaic cells.

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References

[1] LiC-y, CaoQ, ChengC-j, et al.. Generating hollow Gaussian beams with improved Fresnel zone plates. Laser & Optoelectronics Progress, 2023, 60(9): 3788/LOP221160[J]

[2] XuM, ZhangL-d, BianZ-y, et al.. Electrically controllable liquid crystal paraxial Fresnel zone plate based on concentric zones patterned electrode. Optics & Laser Technology, 2023, 163: 109348 J]

[3] HaoJ-b, LinJ, YeX, et al.. Polarization-optimized metasurface Fresnel zone plate for on-axis intensity redistribution. Optics Communications, 2023, 540: 129504 J]

[4] LiY-l, LuW-e, WangS-f, et al.. Fabrication of multilayer Fresnel zone plate for hard X-ray microscopy by atomic layer deposition and focused ion beam milling. Vacuum, 2023, 209: 111776 J]

[5] HaberbergerD, ShvydkyA, NilsonP M, et al.. Contrast optimization of Fresnel zone plate imaging. Review of Scientific Instruments, 2023, 94(5): 053505 J]

[6] TsukamotoY, OzakiM. Liquid crystal micro-Fresnel zone plate with fine variable focusing properties. Optics Continuum, 2023, 2(9): 1889 J]

[7] SunX-y, ZhouF, DongX-r, et al.. Fabrication of GaAs micro-optical components using wet etching assisted femtosecond laser ablation. Journal of Modern Optics, 2020, 67(20): 1516-1523 J]

[8] ZhouF, SunX-y, ZhongH-m, et al.. Optimization of the focusing characteristics of Fresnel zone plates fabricated with a femtosecond laser. Journal of Modern Optics, 2021, 68(2): 100-107 J]

[9] DelullierP, DruartG, De La BarrièreF, et al.. Femtosecond laser direct writing of gradient index Fresnel lens in GeS₂-based chalcogenide glass for imaging applications. Applied Sciences, 2022, 12(9): 4490 J]

[10] HeW, DongY-h, DongM-l, et al.. 800-nm femtosecond-laser-written core-and-cladding integrated fibre Bragg grating inscribed by line-by-line method through fibre coating. Journal of Modern Optics, 2020, 67(2): 173-178 J]

[11] WeiS-b, CaoG-y, LinH, et al.. A varifocal graphene metalens for broadband zoom imaging covering the entire visible region. ACS Nano, 2021, 15(3): 4769-4776 J]

[12] MatsuoS, JuodkazisS, MisawaH. Femtosecond laser microfabrication of periodic structures using a microlens array. Applied Physics A, 2005, 80(4): 683-685 J]

[13] KatoJ I, TakeyasuN, AdachiY, et al.. Multiple-spot parallel processing for laser micronanofabrication. Applied Physics Letters, 2005, 86(4): 044102 J]

[14] DongX-z, ZhaoZ-s, DuanX-M. Micronanofabrication of assembled three-dimensional microstructures by designable multiple beams multiphoton processing. Applied Physics Letters, 2007, 91(12): 124103 J]

[15] StankeviciusE, GertusT, RutkauskasM, et al.. Fabrication of micro-tube arrays in photopolymer SZ2080 by using three different methods of a direct laser polymerization technique. Journal of Micromechanics and Microengineering, 2012, 22(6): 065022 J]

[16] KongD-j, SunX-y, DongZ-l, et al.. Progress in femtosecond laser processing technology based on space beam shaping. Laser & Optoelectronics Progress, 2020, 57(11): 111416 J]

[17] FanH, CaoX-w, LiZ-z, et al.. Progress in femtosecond laser fabrication of microlens array with spatial light modulators. Chinese Journal of Liquid Crystals and Displays, 2021, 36(6): 827-840 J]

[18] KayaG. Controlled formation of femtosecond laser-induced filaments in water. The European Physical Journal D, 2020, 74(2): 38 J]

[19] ZhouY, LiR-z, YuX-h, et al.. Progress in study and application of optical field modulation technology based on liquid crystal spatial light modulators(invited). Acta Photonica Sinica, 2021, 50(11): 1123001[J]

[20] DauderstädtU, DürrP, GehnerA, et al.. Analog spatial light modulators based on micromirror arrays. Micromachines, 2021, 12(5): 483 J]

[21] CaoX-w, LuY-m, FanH, et al.. Wet-etching-assisted femtosecond laser holographic processing of a sapphire concave microlens array. Applied Optics, 2018, 57(32): 9604-9608 J]

[22] ZhaiZ-s, LiQ-y, HeX, et al.. Multiplane holographic imaging using the spatial light modulator. Photonics, 2023, 10(9): 977 J]

[23] LiR-j, RenY, LiuT, et al.. Generating large topological charge Laguerre – Gaussian beam based on 4K phase-only spatial light modulator. Chinese Optics Letters, 2022, 20(12): 10-15 J]

[24] LiuX, TuS-j, KuangC-f, et al.. Calibration of phase-only liquid-crystal spatial light modulators by diffractogram analysis. Optics and Lasers in Engineering, 2022, 156: 107056 J]

[25] HuangX-t, ChangZ-h, ZhaoY-y, et al.. Generation of the anomalous vortex beam by spiral axicon implemented on spatial light modulator. Frontiers in Physics, 2022, 10: 951516 J]

[26] MaY-y, ZhaoD-e, ZhangBin. Research on phase characteristics of liquid crystal spatial light modulator based on polarization display. Laser & Optoelectronics Progress, 2021, 58(7): 0723004 J]

[27] SuiX-m, HeZ-h, CaoL-c, et al.. Recent progress in complex-modulated holographic display based on liquid crystal spatial light modulators. Chinese Journal of Liquid Crystals and Displays, 2021, 36(6): 797-809 J]

[28] GuoC-s, LiuX, RenX-y, et al.. Optimal annular computer-generated holograms for the generation of optical vortices. Journal of the Optical Society of America A, Optics, Image Science, and Vision, 2005, 22(2): 385-390 J]

[29] KuangZ, PerrieW, EdwardsonS P, et al.. Ultrafast laser parallel microdrilling using multiple annular beams generated by a spatial light modulator. Journal of Physics D: Applied Physics, 2014, 47(11): 115501 J]

[30] GuoS-p, LuZ-f, XiongZ, et al.. Lithographic pattern quality enhancement of DMD lithography with spatiotemporal modulated technology. Optics Letters, 2021, 46(6): 1377-1380 J]

[31] WangZ-p, JiangL, LiX-w, et al.. High efficiency and scalable fabrication of Fresnel zone plates using holographic femtosecond pulses. Nanophotonics, 2022, 11(13): 3081-3091 J]

[32] ChengH, XiaC, KueblerS M, et al.. Aberration correction for SLM-generated Bessel beams propagating through tilted interfaces. Optics Communications, 2020, 475: 126213 J]

[33] ScholesS, MohapiL, LeachJ, et al.. Experimentally simulating the beam shaping capabilities of piston-type deformable mirrors using a liquid crystal spatial light modulator. Applied Physics B, 2023, 129(3): 45 J]

[34] LutzC, SchwarzS, MarxJ, et al.. Multi-Bessel beams generated by an axicon and a spatial light modulator for drilling applications. Photonics, 2023, 10(4): 413 J]

[35] KhoninaS N, PorfirevA P. Clusters of rotating beams with autofocusing and transformation properties generated by a spatial light modulator. Applied Physics B, 2023, 129(4): 50 J]

[36] BaliyanM, ShikderA, NishchalN K. Generation of structured light beams by dual phase modulation with a single spatial light modulator. Physica Scripta, 2023, 98(10): 105528 J]

[37] ZhangC-c, HuY-l, LiJ-w, et al.. An improved multi-exposure approach for high quality holographic femtosecond laser patterning. Applied Physics Letters, 2014, 105(22): 221104 J]

[38] ChangC-l, XiaJ, YangL, et al.. Speckle-suppressed phase-only holographic three-dimensional display based on double-constraint Gerchberg-Saxton algorithm. Applied Optics, 2015, 54(23): 6994-7001 J]

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Central South University