Enabling electrically tunable radio frequency components with advanced microfabrication and thin film techniques

Abstract

Multi-function, multiband, cost-effective, miniaturized reconfigurable radio frequency (RF) components are highly demanded in modern and future wireless communication systems. This paper discusses the needs and implementation of multiband reconfigurable RF components with microfabrication techniques and advanced materials. RF applications of fabrication methods such as surface and bulk micromachining techniques are reviewed, especially on the development of RF microelectromechanical systems (MEMS) and other tunable components. Works on the application of ferroelectric and ferromagnetic materials are investigated, which enables RF components with continuous tunability, reduced size, and enhanced performance. Methods and strategies with nano-patterning to improve high frequency characteristics of ferromagnetic thin film (e. g., ferromagnetic resonance frequency and losses) and their applications on the development of fully electrically tunable RF components are fully demonstrated.

Keywords

tunable RF components / bulk micromachining / surface micromachining / thin film techniques

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