Femtosecond-laser direct writing 3D micro/nano-lithography using VIS-light oscillator

Abstract

Here we report a femtosecond laser direct writing (a precise 3D printing also known as two-photon polymerization lithography) of hybrid organic-inorganic SZ2080™ pre-polymer without using any photo-initiator and applying ∼100 fs oscillator operating at 517 nm wavelength and 76 MHz repetition rate. The proof of concept was experimentally demonstrated and benchmarking 3D woodpile nanostructures, micro-scaffolds, free-form micro-object “Benchy” and bulk micro-cubes are successfully produced. The essential novelty underlies the fact that non-amplified laser systems delivering just 40–500 pJ individual pulses are sufficient for inducing localized cross-linking reactions within hundreds of nanometers in cross sections. And it is opposed to the prejudice that higher pulse energies and lower repetition rates of amplified lasers are necessary for structuring non-photosensitized polymers. The experimental work is of high importance for fundamental understanding of laser enabled nanoscale 3D additive manufacturing and widens technology’s field of applications where the avoidance of photo-initiator is preferable or is even a necessity, such as micro-optics, nano-photonics, and biomedicine.

Keywords

laser direct writing / two-photon polymerization / multi-photon lithography / 3D printing / additive manufacturing / SZ2080™ / microstructures / nanotechnology

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