Breakdown mechanism of CF₄ and N₂ binary gas in refrigeration temperature range

Abstract

The mechanism of gas discharge in refrigeration temperature range is still not clear. N₂, CF₄, 20% CF₄+N₂ and 50%CF₄+50%N₂ binary gas mixtures were tested under the conditions of–153–25 °C and 50–2000 Pa. The experimental results show that the minimum of Paschen curves of all test samples shifts to low pressure, from 500 Pa to 200 Pa. The value of Paschen curve minimum of N₂ shows remarkable fluctuation. This fluctuation is explained by molecule agglomeration and electronic mean energy. The fluctuation decreases with the increasing mixing ratio of CF₄. What’s more, the value of Paschen curve minimum of CF₄ decreases with temperature. This phenomenon is ascribed to attach-radiation and secondary process.

Keywords

CF₄ / N₂ / agglomeration / attach-radition / breakdown mechanism / refrigeration temperature range

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