Modeling, identification and compensation for geometric errors of laser annealing table

Abstract

In order to improve the process precision of an XY laser annealing table, a geometric error modeling, and an identification and compensation method were proposed. Based on multi-body system theory, a geometric error model for the laser annealing table was established. It supports the identification of 7 geometric errors affecting the annealing accuracy. An original identification method was presented to recognize these geometric errors. Positioning errors of 5 lines in the workspace were measured by a laser interferometer, and the 7 geometric errors were identified by the proposed algorithm. Finally, a software-based error compensation method was adopted, and a compensation mechanism was developed in a postprocessor based on LabVIEW. The identified geometric errors can be compensated by converting ideal NC codes to actual NC codes. A validation experiment has been conducted on the laser annealing table, and the results indicate that positioning errors of two validation lines decreased from ±37 μm and ±33 μm to ±5 μm and ±4.5 μm, respectively. The geometric error modeling, identification and compensation method presented in this work can be straightforwardly extended to any configurations of 2-dimensional worktable.

Keywords

geometric error / error modeling / error measurement / error identification / error compensation / laser annealing table

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