Study on Microstructure Formation and Its Processing Technology in Short Pulse Laser Micromachining

Abstract

The short pulse laser is a research focus due to its high precision, non-contact and high controllability advantages. In this paper, nanosecond laser pulse ablation experiments on the titanium alloy surface were conducted to explore the interaction between nanosecond laser and titanium alloy. The formation mechanism of a volcano-like pit under the combined influence of surface tension, the Marangoni effect and recoil pressure was clarified and verified. Thereafter, a multi-pulse laser parameter experiment was carried out. Ablation morphology, quality and feature sizes of the volcano-like pit and micro-groove were studied under different laser parameters. Thus, the correlation between laser parameters and feature sizes was built. This study contributes to micromachining technology with nanosecond laser, which suggests that micro-pit and micro-groove with specific sizes and high processing quality can be obtained.

Keywords

short pulse laser / micromachining / volcano-like pit / micro-groove

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Funding

National Natural Science Foundation of China(52205453); Natural Science Foundation of Shanghai, China(22ZR1402700); Opening Foundation of Shanghai Collaborative Innovation Center of High Performance Fibers and Composites (Province-Minitry Joint), China(X12812101/019)