Aurum-Mesh Transfer of Large-Scale Monolayer Graphene Patterns

Abstract

When graphene prepared by chemical vapor deposition(CVD) method is applied to various high-performance devices, graphene's transfer and patterning process usually reduces its intrinsic properties. A new method combining wet transfer and mechanical exfoliation can be utilized to accomplish high-quality and large-scale transfer of graphene patterns. This method requires the preparation of an aurum(Au)-mesh with pores of a specific form as the peeling belt. The contact area between the Au and graphene can offer sufficient adhesion to the homogeneous monolayer graphene for mechanical exfoliation, whereas the non-contact area between the hole and graphene has a relatively weak force to release the graphene patterns on the substrate. The surface morphology and electrical characterization of graphene show that the graphene surface is clean and uniform, while graphene field-effect transistors have high carrier mobility and small Dirac voltage. The Au-mesh transfer method can effectively improve the quality of the graphene patterns as well as the efficiency of the transfer, which opens up a broader scope for the application of CVD graphene and also provides a reference for the transfer of other CVD two-dimensional(2D) materials.

Keywords

graphene transfer / graphene pattern / Au-mesh / lithography / transistor

References

[1] LU H, LIU W J, WANG H L, et al. Molecular beam epitaxy growth and scanning tunneling microscopy study of 2D layered materials on epitaxial graphene/silicon carbide[J]. Nanotechnology, 2023, 34(13):132001.

[2] XING W Q, HU J M, ZHANG X. Electrochemical reduction determination of N-nitrosodiphenylamine in food based on graphene electrode material[J]. Journal of Donghua University (English Edition), 2022, 39(2):128-133.

[3] LI X S, CAI W W, AN J, et al. Large-area synthesis of high-quality and uniform graphene films on copper foils[J]. Science, 2009, 324(5932):1312-1314.

[4] LEE Y, BAE S K, JANG H, et al. Wafer-scale synthesis and transfer of graphene films[J]. Nano Letters, 2010, 10(2):490-493.

[5] AN H, LEE W J, JUNG J. Graphene synthesis on Fe foil using thermal CVD[J]. Current Applied Physics, 2011, 11(4):S81-S85.

[6] SUTTER E, ALBRECHT P, SUTTER P. Graphene growth on polycrystalline Ru thin films[J]. Applied Physics Letters, 2009, 95(13):113109.

[7] WANG S M, PEI Y H, WANG X, et al. Synthesis of graphene on a polycrystalline Co film by radio-frequency plasma-enhanced chemical vapour deposition[J]. Journal of Physics D:Applied Physics, 2010, 43(45):455402.

[8] VO-VAN C, KIMOUCHE A, RESERBAT-PLANTEY A, et al. Epitaxial graphene prepared by chemical vapor deposition on single crystal thin iridium films on sapphire[J]. Applied Physics Letters, 2011, 98(18):181903.

[9] KIM K S, ZHAO Y, JANG H, et al. Large-scale pattern growth of graphene films for stretchable transparent electrodes[J]. Nature, 2009,457:706-710.

[10] KANG B J, MUN J H, HWANG C Y, et al. Monolayer graphene growth on sputtered thin film platinum[J]. Journal of Applied Physics, 2009, 106(10):104309.

[11] OZNULUER T, PINCE E, POLAT E O, et al. Synthesis of graphene on gold[J]. Applied Physics Letters, 2011, 98(18):183101.

[12] WANG G, ZHANG M, ZHU Y, et al. Direct growth of graphene film on germanium substrate[J]. Scientific Reports, 2013,3:2465.

[13] LEE J H, LEE E K, JOO W J, et al. Wafer-scale growth of single-crystal monolayer graphene on reusable hydrogen-terminated germanium[J]. Science, 2014, 344(6181):286-289.

[14] MA L P, REN W C, CHENG H M. Transfer methods of graphene from metal substrates:a review[J]. Small Methods, 2019, 3(7):1900049.

[15] WATSON A J, LU W B, GUIMARÃES M H D, et al. Transfer of large-scale two-dimensional semiconductors:challenges and developments[J]. 2D Materials, 2021, 8(3):032001.

[16] SONG Y Q, ZOU W T, LU Q, et al. Graphene transfer:paving the road for applications of chemical vapor deposition graphene[J]. Small, 2021, 17(48):e2007600.

[17] AHN Y, KIM H, KIM Y H, et al. Procedure of removing polymer residues and its influences on electronic and structural characteristics of graphene[J]. Applied Physics Letters, 2013, 102(9):091602.

[18] ZHUANG B Z, LI S Y, LI S Y, et al. Ways to eliminate PMMA residues on graphene:superclean graphene[J]. Carbon, 2021,173:609-636.

[19] LIU F. Mechanical exfoliation of large area 2D materials from vdW crystals[J]. Progress in Surface Science, 2021, 96(2):100626.

[20] LIN Y C, JIN C H, LEE J C, et al. Clean transfer of graphene for isolation and suspension[J]. ACS Nano, 2011, 5(3):2362-2368.

[21] LI Z W, REN L W, WANG S Y, et al. Dry exfoliation of large-area 2D monolayer and heterostructure arrays[J]. ACS Nano, 2021, 15(8):13839-13846.

[22] LIU L T, KONG L G, LI Q Y, et al. Transferred van der Waals metal electrodes for sub-1-nm MoS₂ vertical transistors[J]. Nature Electronics, 2021,4:342-347.

[23] LIU G Y, TIAN Z A, YANG Z Y, et al. Graphene-assisted metal transfer printing for wafer-scale integration of metal electrodes and two-dimensional materials[J]. Nature Electronics, 2022,5:275-280.

[24] KWON G, CHOI Y H, LEE H, et al. Interaction- and defect-free van der Waals contacts between metals and two-dimensional semiconductors[J]. Nature Electronics, 2022,5:241-247.

[25] KIM H H, YANG J W, JO S B, et al. Substrate-induced solvent intercalation for stable graphene doping[J]. ACS Nano, 2013, 7(2):1155-1162.

[26] FERRARI A C, MEYER J C, SCARDACI V, et al. Raman spectrum of graphene and graphene layers[J]. Physical Review Letters, 2006, 97(18):187401.