MEMS microrobots: components, applications, design challenges and perspectives

Abstract

Micro-electromechanical system (MEMS) microrobots have significant potential in various fields, including healthcare, assembly, and industrial monitoring. This paper provides a comprehensive review of microrobot components, including materials, sensing, actuation, and power systems. It also discusses microrobot classifications - such as swimming, walking, aerial types, microgrippers, and micromanipulators - and summarizes the significance and primary applications of each category. Finally, key challenges, particularly those related to sensing and powering microrobots, are examined, along with current perspectives and potential solutions.

Keywords

Microrobots / microgrippers / micromanipulators / sensing / powering