Computational design of two-dimensional MA2Z4 family field-effect transistor for future Ångström-scale CMOS technology nodes

Che Chen Tho , Zongmeng Yang , Shibo Fang , Shiying Guo , Liemao Cao , Chit Siong Lau , Fei Liu , Shengli Zhang , Jing Lu , L. K. Ang , Lain-Jong Li , Yee Sin Ang

InfoMat ›› 2026, Vol. 8 ›› Issue (2) : e70096

PDF (35389KB)
InfoMat ›› 2026, Vol. 8 ›› Issue (2) :e70096 DOI: 10.1002/inf2.70096
REVIEW ARTICLE
Computational design of two-dimensional MA2Z4 family field-effect transistor for future Ångström-scale CMOS technology nodes
Author information +
History +
PDF (35389KB)

Abstract

Advancing complementary metal–oxide–semiconductor (CMOS) technology into the sub-1-nm Ångström-scale technology nodes is expected to involve alternative semiconductor materials as silicon transistors encounter severe performance degradation at physical gate lengths below 10 nm. Two-dimensional (2D) semiconductors have emerged as strong candidates for overcoming the short-channel effects due to their atomically thin bodies that significantly improves the gate control in aggressively scaled field-effect transistors (FETs). Among the growing library of 2D materials, MA2Z4 family has attracted increasing attention for its remarkable ambient stability, suitable bandgaps, and favorable carrier transport characteristics. While experimental realization of sub-10-nm 2D FETs remains technologically demanding, computational device simulations using first-principles density functional theory combined with nonequilibrium Green's function transport simulations provide a powerful and cost-effective route for assessing the performance limits and optimal design of ultrascaled FET. This review consolidates the current progress in the computational design of MA2Z4 family FETs. We review the physical properties of MoSi2N4 that makes them compelling candidates for transistor applications, and the simulated device performance and optimization strategy of MA2Z4 family FETs. Finally, we discuss the key challenges and research gaps, as well as the future directions of MA2Z4 family FET research toward the Ångström-scale CMOS era.

Keywords

2D semiconductors / computational device design / field-effect transistors / MoSi2N4 family / NEGF simulations

Cite this article

Download citation ▾
Che Chen Tho, Zongmeng Yang, Shibo Fang, Shiying Guo, Liemao Cao, Chit Siong Lau, Fei Liu, Shengli Zhang, Jing Lu, L. K. Ang, Lain-Jong Li, Yee Sin Ang. Computational design of two-dimensional MA2Z4 family field-effect transistor for future Ångström-scale CMOS technology nodes. InfoMat, 2026, 8 (2) : e70096 DOI:10.1002/inf2.70096

登录浏览全文

4963

注册一个新账户 忘记密码

References

[1]

Zhang Q, Zhang Y, Luo Y, Yin H. New structure transistors for advanced technology node CMOS ICS. Natl Sci Rev. 2024; 11(3):nwae008.

[2]

Duan H. From MOSFET to FINFET to GAAFET: the evolution, challenges, and future prospects. Appl Comput Eng. 2024; 50: 113.

[3]

Dutta C, Dastidar A, Bhuyan KC. Low power design technology from MOSFETS to CFETS. Exploring the Intricacies of Digital and Analog VLSI. IGI Global Scientific Publishing; 2025: 1-48.

[4]

Lee Y-H, Zhang X-Q, Zhang W, et al. Synthesis of large-area MoS2 atomic layers with chemical vapor deposition. Adv Mater. 2012; 24(17): 2320-2325.

[5]

Choi W, Choudhary N, Han GH, Park J, Akinwande D, Lee YH. Recent development of two-dimensional transition metal dichalcogenides and their applications. Mater Today. 2017; 20(3): 116-130.

[6]

Liu H, Du Y, Deng Y, Peide DY. Semiconducting black phosphorus: synthesis, transport properties and electronic applications. Chem Soc Rev. 2015; 44(9): 2732.

[7]

Padilha JE, Miwa RH, da Silva AJR, Fazzio A. Two-dimensional van der Waals p-n junction of InSe/phosphorene. Phys. Rev. B. 2017; 95(195143):195143.

[8]

Liu Y, Huang Y, Duan X. Van der Waals integration before and beyond two-dimensional materials. Nature. 2019; 567(7748): 323-333.

[9]

Lim H, Yoon SI, Kim G, Jang A-R, Shin HS. Stacking of two-dimensional materials in lateral and vertical directions. Chem Mater. 2014; 26(17): 4891-4903.

[10]

Guo H-W, Hu Z, Liu Z-B, Tian J-G. Stacking of 2D materials. Adv Funct Mater. 2021; 31(4):2007810.

[11]

Hu Z, Liu Z-B, Tian J-G. Stacking of exfoliated twodimensional materials: a review. Chin J Chem. 2020; 38(9): 981.

[12]

Qian X, Wang Y, Li W, Lu J, Li J. Modelling of stacked 2D materials and devices. 2D Mater. 2015; 2:032003.

[13]

Celano U, Schmidt D, Beitia C, Orji G, Davydov AV, Obeng Y. Metrology for 2D materials: a perspective review from the international roadmap for devices and systems. Nanoscale Adv. 2024; 6(9): 2260-2269.

[14]

Irisawa T. Two-dimensional material transistors: expectations observed in the irds road map and latest research progresses. JSAP Rev. 2024; 2024:240307.

[15]

Zheng F, Meng W, Li L-J. Continue the scaling of electronic devices with transition metal dichalcogenide semiconductors. Nano Lett. 2025; 25(10): 3683-3691.

[16]

Yin Y, Gong Q, Yi M, Guo W. Emerging versatile twodimensional MoSi2N4 family. Adv Funct Mater. 2023; 33(26):2214050.

[17]

Latychevskaia T, Bandurin D, Novoselov K. A new family of septuple-layer 2D materials of MoSi2N4-like crystals. Nat Rev Phys. 2024; 6: 426.

[18]

Jin W, Zuo J, Pang J, et al. Two-dimensional MoSi2N4 family: progress and perspectives form theory. J Phys Chem Lett. 2024; 15(41): 10284-10294.

[19]

Wang L, Shi Y, Liu M, et al. Intercalated architecture of MA2Z4 family layered van der Waals materials with emerging topological, magnetic and superconducting properties. Nat Commun. 2021; 12: 1.

[20]

Liu C, Wang Z, Xiong W, Zhong H, Yuan S. Effect of vertical strain and in-plane biaxial strain on Type-II MoSi2N4/Cs3Bi2I9 van der Waals heterostructure. J Appl Phys. 2022; 131(16):163102.

[21]

Cai X, Zhang Z, Zhu Y, et al. A two-dimensional MoSe2/MoSi2N4 van der Waals heterostructure with high carrier mobility and diversified regulation of its electronic properties. J Mater Chem C. 2021; 9(31): 10073-10083.

[22]

Cai X, Zhang Z, Song A, et al. Indirect to Direct Bandgap Transition and Enhanced Optoelectronic Properties in WSe2 Monolayer Through Forming WSe2/MoSi2N4 Bilayer. Available at SSRN 3968855. 2021.

[23]

Pham D. Electronic properties of a two-dimensional van der Waals MoGe2N4/MoSi2N4 heterobilayer: effect of the insertion of a graphene layer and interlayer coupling. RSC Adv. 2021; 11:28659.

[24]

Nguyen CQ, Ang YS, Nguyen S-T, Hoang NV, Hung NM, Nguyen CV. Tunable Type-II band alignment and electronic structure of C3N4/MoSi2N4 heterostructure: interlayer coupling and electric field. Phys Rev B. 2022; 105(4):045303.

[25]

Wang J, Zhao X, Hu G, Ren J, Yuan X. Manipulable electronic and optical properties of two-dimensional MoSTe/MoGe2N4 van der Waals heterostructures. Nanomaterials. 2021; 11(12): 3338.

[26]

Guo Y, Min J, Cai X, Zhang L, Liu C, Jia Y. Twodimensional Type-II BP/MoSi2P4 vdW heterostructures for high-performance solar cells. J Phys Chem C. 2022; 126(9): 4677-4683.

[27]

Ren Y-T, Hu L, Chen Y-T, et al. Two-dimensional MSi2N4 monolayers and van der Waals heterostructures: promising spintronic properties and band alignments. Phys Rev Mater. 2022; 6(6):064006.

[28]

He Y, Zhu Y-h, Zhang M, et al. High hydrogen production in the InSe/MoSi2N4 van der Waals heterostructure for overall water splitting. Phys Chem Chem Phys. 2022; 24(4): 2110-2117.

[29]

Zeng J, Xu L, Yang Y, et al. Boosting the photocatalytic hydrogen evolution performance of monolayer C2N coupled with MoSi2N4: densityfunctional theory calculations. Phys Chem Chem Phys. 2021; 23(14): 8318-8325.

[30]

Xuefeng C, Wenna H, Minglei J, et al. A direct z-scheme MoSi2N4/BlueP vdW heterostructure for photocatalytic overall water splitting. J Phys D. 2022; 55(21):215502.

[31]

Xiao C, Ma Z, Sa R, et al. Adsorption behavior of environmental gas molecules on pristine and defective MoSi2N4: possible application as highly sensitive and reusable gas sensors. ACS Omega. 2022; 7(10): 8706.

[32]

Bafekry A, Faraji M, Fadlallah M, et al. Adsorption of habitat and industry-relevant molecules on the MoSi2N4 monolayer. Appl Surf Sci. 2021; 564:150326.

[33]

Hong Y-L, Liu Z, Wang L, et al. Chemical vapor deposition of layered two-dimensional MoSi2N4 materials. Science. 2020; 369(6504): 670-674.

[34]

Huang D, Liang F, Guo R, et al. Exciton self-trapping effect in MoSi2N4 for modulating nonlinear optical process. Adv Opt Mater. 2023; 11:2202622.

[35]

Liu Z, Wang L, Hong Y-L, Chen X-Q, Cheng H-M, Ren W. Two-dimensional superconducting MoSi2N4(MoN)4n homologous compounds. Natl Sci Rev. 2023; 10(4):nwac273.

[36]

He C, Xu C, Chen C, et al. Unusually high thermal conductivity in suspended monolayer MoSi2N4. Nat Commun. 2024; 15(1): 4832.

[37]

Wu H, Sun S, Xu C, Chen K, Ren W, Lai T. Ultrafast exciton and spin dynamics of monolayer MoSi2N4 studied by non-degenerate pump-probe transient transmission spectroscopy. Adv Sci. 2025; 12(17):2417209.

[38]

Li S, Wu W, Feng X, et al. Valley-dependent properties of monolayer MoSi2N4, WSi2N4, and MoSi2As4. Phys Rev B. 2020; 102:235435.

[39]

Guo S-D, Zhu Y-T, Mu W-Q, Ren W-C. Intrinsic piezoelectricity in monolayer MSi2N4 (M = Mo, W, Cr, Ti, Zr and Hf). EPL. 2020; 132(5):57002.

[40]

Mortazavi B, Javvaji B, Shojaei F, Rabczuk T, Shapeev A, Zhuang X. Exceptional piezoelectricity, high thermal conductivity and stiffness and promising photocatalysis in two-dimensional MoSi2N4 family confirmed by firstprinciples. Nano Energy. 2021; 82:105716.

[41]

Guo S-D, Mu W-Q, Zhu Y-T, Han R-Y, Ren W-C. Predicted septuple-atomic-layer janus MoSiGeN4 (M = Mo and W) monolayers with rashba spin splitting and high electron carrier mobilities. J Mater Chem C. 2021; 9(7): 2464-2473.

[42]

Cao L, Zhou G, Wang Q, Ang LK, Ang YS. Twodimensional van der Waals electrical contact to monolayer MoSi2N4. Appl Phys Lett. 2021; 118(1):013106.

[43]

Yang C, Song Z, Sun X, Lu J. Valley pseudospin in monolayer MoSi2N4 and MoSi2As4. Phys Rev B. 2021; 103:035308.

[44]

Wang Q, Cao L, Liang S-J, et al. Efficient ohmic contacts and built-in atomic sublayer protection in MoSi2N4 and WSi2N4 monolayers. npj 2D Mater Appl. 2021; 5: 71.

[45]

Sun X, Song Z, Huo N, et al. Performance limit of monolayer MoSi2N4 transistors. J Mater Chem C. 2021; 9(41): 14683-14698.

[46]

Huang J, Li P, Ren X, Guo Z-X. Promising properties of a sub-5-nm monolayer MoSi2N4 transistor. Phys Rev Appl. 2021; 16(4):044022.

[47]

Nandan K, Ghosh B, Agarwal A, Bhowmick S, Chauhan YS. Two-dimensional MoSi2N4: an excellent 2-D semiconductor for field-effect transistors. IEEE Trans Electron Devices. 2021; 69(1): 406.

[48]

Wang J, Zhang Z, Shen J, Zhang M, Niu L, Bai L. First-principles investigation of mxene/MoSi2N4 van der Waals heterostructures: strong fermi level pinning effect resulting in ohmic contact with low contact resistance. J Phys Chem C. 2023; 127:18067.

[49]

Qu H, Zhang S, Zeng H. Two-dimensional MSi2N4 heterostructure p-type transistors with sub-thermionic transport performances. IEEE Electron Device Lett. 2023; 44(9): 1492.

[50]

Qu H, Zhang S, Cao J, et al. Identifying atomically thin isolated-band channels for intrinsic steep-slope transistors by high-throughput study. Sci Bull. 2024; 69(10): 1427.

[51]

Li Y, Xu L, Yang C, et al. Electrical contacts in monolayer MoSi2N4 transistors. ACS Appl Mater Interfaces. 2024; 16(37): 49496-49507.

[52]

Marin E, Perucchini M, Marian D, Iannaccone G, Fiori G. Modeling of electron devices based on 2-D materials. IEEE Trans Electron Devices. 2018; 65(10): 4167-4179.

[53]

Quhe R, Xu L, Liu S, et al. Sub-10 nm two-dimensional transistors: theory and experiment. Phys Rep. 2021; 938: 1-72.

[54]

Meena S, Sharma N, Jogi J. Sub-5 nm 2D semiconductor-based monolayer field-effect transistor: status and prospects. Phys Status Solidi A. 2023; 220:2200526.

[55]

Datta S. The non-equilibrium Green's function (NEGF) formalism: an elementary introduction, in digest. International Electron Devices Meeting. IEEE; 2002: 703-706.

[56]

He X, Li W, Gao Z, Zhang Z, He Y. Achieving real ohmic contact by the dual protection of outer layer atoms and surface functionalization in 2D metal Mxenes/MoSi2N4 heterostructures. J Mater Chem C. 2023; 11(14): 4728-4741.

[57]

Zhao H, Yang G, Liu Y, et al. Quantum transport of sub-10 nm monolayer WGe2N4 transistors. ACS Appl Electron Mater. 2021; 3(11): 5086-5094.

[58]

Ye B, Jiang X, Gu Y, et al. Quantum transport of short-gate mosfets based on monolayer MoSi2N4. Phys Chem Chem Phys. 2022; 24(11): 6616-6626.

[59]

Shu L, Qian L, Ye X, Xie Y. Multifunctional twodimensional VSi2N4/WSi2N4/VSi2N4 photodetector driven by the photogalvanic effect. Phys Rev Appl. 2022; 17(5):054010.

[60]

Tho CC, Yu C, Tang Q, et al. Cataloguing MoSi2N4 and WSi2N4 van der Waals heterostructures: an exceptional material platform for excitonic solar cell applications. Adv Mater Interfaces. 2023; 10(2):2201856.

[61]

Ng JQ, Wu Q, Ang LK, Ang YS. Tunable electronic properties and band alignments of MoSi2N4/GaN and MoSi2N4/ZnO van der Waals heterostructures. Appl Phys Lett. 2022; 120(10):103101.

[62]

Bafekry A, Faraji M, Ziabari AA, et al. A van der Waals heterostructure of MoS2/MoSi2N4: a first-principles study. New J Chem. 2021; 45(18): 8291-8296.

[63]

Li X-M, Lin Z-Z, Cheng L-R, Chen X. Layered MoSi2N4 as electrode material of Zn–air battery. Phys Status Solidi Rapid Res Lett. 2022; 16(5):2200007.

[64]

Zhong T, Ren Y, Zhang Z, Gao J, Wu M. Sliding ferroelectricity in two-dimensional MoA2N4 (A = Si or Ge) bilayers: high polarizations and Moir'e potentials. J Mater Chem A. 2021; 9(35): 19659-19663.

[65]

Li Z, Han J, Cao S, Zhang Z, Deng X. First-principles study of metal-semiconductor contacts and quantum transport simulations for 5.1-nm monolayer MoSi2N4 devices. Phys Rev Appl. 2024; 21(5):054062.

[66]

Meng Y, Xu Y, Zhang J, Sun J, Zhang G, Leng J. Theoretical study on the electronic and transport properties of top and edge contact MoSi2N4/Au heterostructure. Phys Lett A. 2022; 456:128535.

[67]

Shu Y, Liu Y, Cui Z, et al. Efficient ohmic contact in monolayer CrX2N4 (X = C, Si) based field-effect transistors. Adv Electron Mater. 2023; 9(3):2201056.

[68]

International Technology Roadmap for Semiconductors. Accessed 1/10/2025.

[69]

International Roadmap for Devices and Systems (IRDS™). Accessed 1 October 2025.

[70]

Guo S, Qu H, Zhou W, et al. High-performance and low-power transistors based on anisotropic monolayer β-TeO2. Phys Rev Appl. 2022; 17(6):064010.

[71]

Li Y, Qi C, Zhou X, et al. Monolayer WSi2N4: a promising channel material for sub-5-nm-gate homogeneous CMOS devices. Phys Rev Appl. 2023; 20(6):064044.

[72]

Khanna VK. Short-channel effects in mosfets. Integrated Nanoelectronics: Nanoscale CMOS, Post-CMOS and Allied Nanotechnologies. Springer India; 2016: 73-93.

[73]

Datta S. Nanoscale device modeling: the green's function method. Superlattices Microstruct. 2000; 28(4): 253-278.

[74]

Salahuddin S, Datta S. Use of negative capacitance to provide voltage amplification for low power nanoscale devices. Nano Lett. 2008; 8(2): 405-410.

[75]

Alam MA, Si M, Ye PD. A critical review of recent progress on negative capacitance field-effect transistors. Appl Phys Lett. 2019; 114(9): 090401.

[76]

Kanungo S, Ahmad G, Sahatiya P, Mukhopadhyay A, Chattopadhyay S. 2D materials-based nanoscale tunneling field effect transistors: current developments and future prospects. npj 2D Mater Appl. 2022; 6: 83.

[77]

Dong M-M, He H, Wang C-K, Fu X-X. Twodimensional MoSi2As4-based field-effect transistors integrating switching and gas-sensing functions. Nanoscale. 2023; 15(20): 9106-9115.

[78]

Dong M-M, He H, Niu Y, Wang C-K, Fu X-X. Prediction of semiconducting 2D nanofilms of janus WSi2P2As2 for applications in sub-5 nm field-effect transistors. ACS Appl Nano Mater. 2023; 6(3): 1541-1548.

[79]

Zhao Y, Li Y, Ma F. Performance upper limit of sub-10 nm monolayer MoS2 transistors with MoS2–Mo electrodes. J Phys Chem C. 2022; 126(29): 12100-12112.

[80]

Han G, Yoon Y. Contact-dependent performance variability of monolayer MoS2 field-effect transistors. Appl Phys Lett. 2014; 105(21): 213508.

[81]

Zhang H, Shi B, Xu L, et al. Sub-5 nm monolayer MoS2 transistors toward lowpower devices. ACS Appl Electron Mater. 2021; 3(4): 1560-1571.

[82]

Wang H, Yu L, Lee Y-H, et al. Integrated circuits based on bilayer MoS2 transistors. Nano Lett. 2012; 12(9): 4674-4680.

[83]

Khorram HG, Sheikhaei S, Touski SB, Kokabi A. Field-effect transistor based on MoSi2N4 monolayer for digital logic applications. IEEE Trans Electron Devices. 2024; 71(11): 7131-7137.

[84]

Sun X, Fang S, Zhang G, et al. Monolayer ws2 sub-5 nm transistor for future technology nodes: a theoretical study. ACS Appl Nano Mater. 2025; 8:12594.

[85]

Sun X, Xu L, Zhang Y, et al. Performance limit of monolayer WSe2 transistors; significantly outperform their MoS2 counterpart. ACS Appl Mater Interfaces. 2020; 12(18): 20633-20644.

[86]

Wang Y, Fei R, Quhe R, et al. Many-body effect and device performance limit of monolayer InSe. ACS Appl Mater Interfaces. 2018; 10(27): 23344-23352.

[87]

Quhe R, Li Q, Zhang Q, et al. Simulations of quantum transport in sub-5-nm monolayer phosphorene transistors. Phys Rev Appl. 2018; 10:024022.

[88]

Jiang J, Xu L, Qiu C, Peng L-M. Ballistic twodimensional InSe transistors. Nature. 2023; 616(7957): 470-475.

[89]

Dai M, Gao C, Nie Q, et al. Properties, synthesis, and device applications of 2D layered InSe. Adv Mater Technol. 2022; 7:2200321.

[90]

Li Q, Yang C, Xu L, et al. Symmetric and excellent scaling behavior in ultrathin n- and p-type gate-all-around InAs nanowire transistors. Adv Funct Mater. 2023; 33(23):2214653.

[91]

Lotov AV, Miettinen K. Visualizing the Pareto frontier. Multiobjective Optimization: Interactive and Evolutionary Approaches. Springer; 2008: 213-243.

[92]

Fiori G, Bonaccorso F, Iannaccone G, et al. Electronics based on two-dimensional materials. Nat Nanotechnol. 2014; 9(10): 768-779.

[93]

Pan Y, Dai J, Xu L, et al. Sub-5-nm monolayer silicane transistor: a first-principles quantum transport simulation. Phys Rev Appl. 2020; 14(2):024016.

[94]

Lu A-Y, Zhu H, Xiao J, et al. Janus monolayers of transition metal dichalcogenides. Nat Nanotechnol. 2017; 12(8): 744-749.

[95]

Liu F. Switching at less than 60 mv/decade with a “cold” metal as the injection source. Phys Rev Appl. 2020; 13:064037.

[96]

Geim AK, Novoselov KS. The rise of graphene. Nat Mater. 2007; 6(3): 183-191.

[97]

Qiu C, Liu F, Xu L, et al. Dirac-source field-effect transistors as energy-efficient, high-performance electronic switches. Science. 2018; 361(6400): 387-392.

[98]

Hasani N, Shalchian M, Rajabi-Maram A, Touski SB. Electrical properties of double-gate field-effect transistor based on MA2N4 (M = Ti, Zr, and Hf; A = Si, Ge, and Sn) monolayers. IEEE Trans Electron Devices. 2023; 70(10): 5415-5420.

[99]

Nandan K, Naseer A, Agarwal A, Bhowmick S, Chauhan YS. Transistors based on novel 2-D monolayer semiconductors Bi2O2Se, InSe, and MoSi2N4 for enhanced logic density scaling. IEEE Trans Electron Devices. 2025; 72(1): 516.

[100]

Nandan K, Bhowmick S, Chauhan YS, Agarwal A. Designing power-efficient transistors using narrow-bandwidth materials from the MA2Z4 (M = Mo, Cr, Zr, Ti, Hf; A = Si, Ge; Z = N, P, As) monolayer series. Phys Rev Appl. 2023; 19(6):064058.

[101]

Ghobadi N, Hosseini M, Touski SB. Field-effect transistor based on MoSi2N4 and WSi2N4 monolayers under biaxial strain: a computational study of the electronic properties. IEEE Trans Electron Devices. 2022; 69(2): 863-869.

[102]

Zhang K, Robinson J. Doping of two-dimensional semiconductors: a rapid review and outlook. MRS Adv. 2019; 4(51-52): 2743-2757.

[103]

Zhao Y, Xu K, Pan F, Zhou C, Zhou F, Chai Y. Doping, contact and interface engineering of two-dimensional layered transition metal dichalcogenides transistors. Adv Funct Mater. 2017; 27(19):1603484.

[104]

Lee F, Tripathi M, Salas RS, et al. Localised strain and doping of 2D materials. Nanoscale. 2023; 15(16):7227.

[105]

Tho CC, Guo S-D, Liang S-J, et al. MA2Z4 family heterostructures: promises and prospects. Appl Phys Rev. 2023; 10(4):041307.

[106]

Li Z, Han J, Cao S, Zhang Z, Deng X. Geometrical stability, electrical properties, and device applications of various MoSi2N4 derivatives and their heterojunctions. Phys Rev Appl. 2025; 23(1):014042.

[107]

Liu F, Qiu C, Zhang Z, Peng L-M, Wang J, Guo H. Dirac electrons at the source: breaking the 60-mv/decade switching limit. IEEE T Electron Devices. 2018; 65(7): 2736.

[108]

Lyu J, Pei J, Guo Y, Gong J, Li H. A new opportunity for 2D van der Waals heterostructures: making steep-slope transistors. Adv Mater. 2020; 32(2):1906000.

[109]

Li H, Xu P, Xu L, Zhang Z, Lu J. Negative capacitance tunneling field effect transistors based on monolayer arsenene, antimonene, and bismuthene. Semicond Sci Technol. 2019; 34(8):085006.

[110]

Chen FW, Ilatikhameneh H, Ameen TA, Klimeck G, Rahman R. Thickness engineered tunnel field-effect transistors based on phosphorene. IEEE Electron Device Lett. 2016; 38(1): 130.

[111]

Szabo A, Koester SJ, Luisier M. Ab-initio simulation of van der Waals MoTe2–SnS2 heterotunneling fets for lowpower electronics. IEEE Electron Device Lett. 2015; 36(5): 514.

[112]

Huang X, Liu C, Zhou P. 2D semiconductors for specific electronic applications: from device to system. npj 2D Mater Appl. 2022; 6: 51.

[113]

Cao W, Kang J, Liu W, Banerjee K. A compact current–voltage model for 2D semiconductor based field-effect transistors considering interface traps, mobility degradation, and inefficient doping effect. IEEE Trans Electron Devices. 2014; 61(12): 4282-4290.

[114]

Suryavanshi SV, Pop E. S2DS: physics-based compact model for circuit simulation of two-dimensional semiconductor devices including non-idealities. J Appl Phys. 2016; 120(22):224503.

[115]

Ducry F, Van Troeye B, De La Rosa C, Kar G, Pourtois G, Afzalian A. First principles modelling perspective for 2D channel–3D oxide interfaces. 2024 8th IEEE Electron Devices Technology & Manufacturing Conference (EDTM). IEEE; 2024: 1-3.

[116]

Şaşıoğlu E, Bodewei P, Hinsche NF, Mertig I. Multifunctional steep-slope spintronic transistors with spin-gapless semiconductor or spin-gapped-metal electrodes. Phys Rev Appl. 2025; 23:044022.

[117]

Salami N, Shokri A, Esrafilian M. Vertical quantum tunneling transport based on MoS2/WTe2 nanoribbons. Phys Lett A. 2022; 445:128228.

[118]

Xu X, Guo T, Kim H, et al. Growth of 2D materials at the wafer scale. Adv Mater. 2022; 34(14):2108258.

[119]

Geng D, Yang HY. Recent advances in growth of novel 2D materials: beyond graphene and transition metal dichalcogenides. Adv Mater Lett. 2018; 30:1800865.

[120]

Chiappe D, Ludwig J, Leonhardt A, et al. Layer-controlled epitaxy of 2D semiconductors: bridging nanoscale phenomena to wafer-scale uniformity. Nanotechnology. 2018; 29:425602.

[121]

Tsang CI, Pu H, Chen J. Multiscale simulation and machine learning facilitated design of two-dimensional nanomaterials-based tunnel field-effect transistors: a review. APL Mach Learn. 2025; 3(1):016115.

[122]

Wang AY-T, Murdock RJ, Kauwe SK, et al. Machine learning for materials scientists: an introductory guide toward best practices. Chem Mater. 2020; 32(12): 4954-4965.

[123]

Venkatakrishnarao D, Mishra A, Tarn Y, et al. Liquid metal oxide-assisted integration of high-k dielectrics and metal contacts for two-dimensional electronics. ACS Nano. 2024; 18(39): 26911-26919.

[124]

Lau CS, Das S, Verzhbitskiy IA, et al. Dielectrics for two-dimensional transition-metal dichalcogenide applications. ACS Nano. 2023; 17(11): 9870-9905.

[125]

Jiang Z, Su T, Chua C, et al. Lanthanum oxyhalide monolayers: an exceptional dielectric companion to 2-D semiconductors. IEEE Trans Electron Devices. 2023; 70(4): 1509.

[126]

Knobloch T, Uzlu B, Illarionov YY, et al. Improving stability in two-dimensional transistors with amorphous gate oxides by fermi-level tuning. Nat Electron. 2022; 5(6): 356-366.

[127]

Ghosh R, Provias A, Karl A, et al. Theoretical insights into the impact of border and interface traps on hysteresis in monolayer MoS2 FETS. Microelectron Eng. 2025; 299:112333.

[128]

Knobloch T, Illarionov YY, Ducry F, et al. The performance limits of hexagonal boron nitride as an insulator for scaled CMOS devices based on twodimensional materials. Nat Electron. 2021; 4(2): 98-108.

[129]

Dossena M, Van Troeye B, Ducry F, et al. Mobility calculation in disordered Ws2–Al2O3 stacks from first principles. npj 2D Mater Appl. 2025; 9: 67.

[130]

Kühne TD, Iannuzzi M, Del Ben M, et al. Cp2k: an electronic structure and molecular dynamics software package—quickstep: efficient and accurate electronic structure calculations. J Chem Phys. 2020; 152(19):194103.

[131]

Luo P, Zhuge F, Zhang Q, et al. Doping engineering and functionalization of two-dimensional metal chalcogenides. Nanoscale Horiz. 2019; 4(1): 26-51.

[132]

Akinwande D, Biswas C, Jena D. The quantum limits of contact resistance and ballistic transport in 2D transistors. Nat Electron. 2025; 8: 96.

[133]

Rai A, Roy A, Valsaraj A, et al. Devices and defects in two-dimensional materials: outlook and perspectives. Defects in Two-Dimensional Materials. Elsevier; 2022: 339-401.

[134]

Knobloch T, Waldhoer D, Grasser T. Modeling 2D material-based nanoelectronic devices in the presence of defects. IEEE Nanotechnol Mag. 2023; 17(4): 15-25.

[135]

Semenov O, Vassighi A, Sachdev M. Impact of selfheating effect on long-term reliability and performance degradation in CMOS circuits. IEEE Trans Device Mater Rel. 2006; 6(1): 17.

[136]

Cappella A, Battaglia J-L, Schick V, et al. High temperature thermal conductivity of amorphous Al2O3 thin films grown by low temperature ALD. Adv Eng Mater. 2013; 15(11): 1046.

[137]

Wei R, Song S, Yang K, et al. Thermal conductivity of 4H-SIC single crystals. J Appl Phys. 2013; 113(5):053503.

[138]

Perez C, McLeod AJ, Chen ME, et al. High thermal conductivity of submicrometer aluminum nitride thin films sputter-deposited at low temperature. ACS Nano. 2023; 17(21): 21240-21250.

[139]

Kuila C, Maji A, Murmu NC, Kuila T. Hexagonal boron nitride (H-BN) “a miracle in white”: an emerging two-dimensional material for the advanced powered electronics and energy harvesting application. Compos B Eng. 2025; 301:112531.

[140]

Wang J, Zhang L, Wang L, Lei W, Wu Z-S. Twodimensional boron nitride for electronics and energy applications. Energy Environ Mater. 2022; 5(1):10.

[141]

Srivastava A, Fahad MS. Vertical MoS2/hBN/MoS2 interlayer tunneling field effect transistor. Solid-State Electron. 2016; 126: 96.

[142]

Wang J, Jia R, Huang Q, et al. Vertical WS2/SnS2 van der Waals heterostructure for tunneling transistors. Sci Rep. 2018; 8(1):17755.

[143]

Xiong X, Huang M, Hu B, et al. A transverse tunnelling field-effect transistor made from a van der Waals heterostructure. Nat Electron. 2020; 3(2): 106-112.

[144]

Sarkar D, Xie X, Liu W, et al. A subthermionic tunnel field-effect transistor with an atomically thin channel. Nature. 2015; 526(7571): 91-95.

[145]

Li Y, Loh L, Li S, et al. Anomalous resistive switching in memristors based on two-dimensional palladium diselenide using heterophase grain boundaries. Nat Electron. 2021; 4(5): 348-356.

[146]

Pam ME, Li S, Su T, et al. Interface-modulated resistive switching in moirradiated ReS2 for neuromorphic computing. Adv Mater. 2022; 34(30):2202722.

[147]

Shi Y, Liang X, Yuan B, et al. Electronic synapses made of layered two-dimensional materials. Nat Electron. 2018; 1(8): 458-465.

[148]

Jain S, Li S, Zheng H, Li L, Fong X, Ang K-W. Heterogeneous integration of 2D memristor arrays and silicon selectors for compute-in-memory hardware in convolutional neural networks. Nat Commun. 2025; 16(1): 2719.

[149]

Villena MA, Kaya O, Schwingenschlögl U, Roche S, Lanza M. Density functional theory and molecular dynamics simulations for resistive switching research. Mater Sci Eng R Rep. 2024; 160:100825.

[150]

Mitra S, Mahapatra S. Atomistic description of conductive bridge formation in two-dimensional material based memristor. npj 2D Mater Appl. 2024; 8: 26.

[151]

Huh W, Lee D, Lee C-H. Memristors based on 2D materials as an artificial synapse for neuromorphic electronics. Adv Mater. 2020; 32(51):2002092.

[152]

Zhou H, Li S, Ang K-W, Zhang Y-W. Recent advances in in-memory computing: exploring memristor and memtransistor arrays with 2D materials. Nano-Micro Lett. 2024; 16(1): 121.

[153]

Pan C, Wang C-Y, Liang S-J, et al. Reconfigurable logic and neuromorphic circuits based on electrically tunable two-dimensional homojunctions. Nat Electron. 2020; 3(7): 383-390.

[154]

Yang H, Valenzuela SO, Chshiev M, et al. Two-dimensional materials prospects for non-volatile spintronic memories. Nature. 2022; 606(7915): 663-673.

[155]

Huo J, Li L, Zheng H, et al. Compact physical implementation of spiking neural network using ambipolar WSe2 n-type/p-type ferroelectric field-effect transistor. ACS Nano. 2024; 18(41): 28394-28405.

[156]

Ge R, Wu X, Kim M, et al. Atomristor: nonvolatile resistance switching in atomic sheets of transition metal dichalcogenides. Nano Lett. 2018; 18(1): 434-441.

[157]

Yuan Y, Pazos S, Li J, et al. On-chip atomristors. Mater Sci Eng R Rep. 2025; 165:101006.

[158]

Yang Y, Pan C, Li Y, et al. In-sensor dynamic computing for intelligent machine vision. Nat Electron. 2024; 7(3): 225-233.

[159]

Tho CC, Fang S, Ang YS. Zero-dipole Schottky contact: homologous metal contact to 2D semiconductor. APL Electronic Devices. 2025; 1(1):016111.

[160]

Franklin AD. The road to carbon nanotube transistors. Nature. 2013; 498(7455): 443-444.

[161]

Tans SJ, Verschueren AR, Dekker C. Roomtemperature transistor based on a single carbon nanotube. Nature. 1998; 393(6680):49.

[162]

Yao X, Zhang Y, Jin W, Hu Y, Cui Y. Carbon nanotube field-effect transistor-based chemical and biological sensors. Sensors. 2021; 21(3): 995.

[163]

Allen BL, Kichambare PD, Star A. Carbon nanotube field-effect-transistor-based biosensors. Adv Mater. 2007; 19(11): 1439-1451.

[164]

Strojnik M, Kovic A, Mrzel A, Buh J, Strle J, Mihailovic D. MoS2 nanotube field effect transistors. AIP Adv. 2014; 4(9):097114.

[165]

Levi R, Bitton O, Leitus G, Tenne R, Joselevich E. Field-effect transistors based on WS2 nanotubes with high current-carrying capacity. Nano Lett. 2013; 13(8): 3736-3741.

[166]

Tamersit K. WS2 nanosheet-based ultrascaled field-effect transistor for hydrogen gas sensing: addressing the sensitivity-downscaling trade-off. Sensors. 2024; 24(20): 6730.

[167]

Yang M-H, Teo KB, Gangloff L, et al. Advantages of top-gate, high-k dielectric carbon nanotube field-effect transistors. Appl Phys Lett. 2006; 88(11):113507.

[168]

Xie X, Wang Y, Tang Z, Wang Y, Zhang X, Liu F. A bottom-up machine-learning approach for efficient device simulation. IEEE Trans Electron Devices. 2025; 72(3): 1282-1292.

[169]

Choi S, Park DG, Kim MJ, et al. Automatic prediction of metal–oxide–semiconductor field-effect transistor threshold voltage using machine learning algorithm. Adv Intell Syst. 2023; 5(1):2200302.

[170]

Liu Y, Guo J, Zhu E, et al. Approaching the Schottky–Mott limit in van der Waals metal–semiconductor junctions. Nature. 2018; 557(7707): 696-700.

[171]

Akinwande D, Huyghebaert C, Wang C-H, et al. Graphene and two-dimensional materials for silicon technology. Nature. 2019; 573: 507.

[172]

Zhou T, Xu C, Ren W. The van der Waals MoSi2N4 materials family. Nat Rev Mater. 2025; 1.

RIGHTS & PERMISSIONS

2025 The Author(s). InfoMat published by UESTC and John Wiley & Sons Australia, Ltd.

PDF (35389KB)

0

Accesses

0

Citation

Detail

Sections
Recommended

/