Synthesis diamond films on high entropy alloys by chemical vapor deposition: Microstructure, growth behavior and corrosion

Abstract

The heteroepitaxy of diamond films has received widespread attention; however, its application remains limited owing to the mismatch in properties and structure between diamond and heterogeneous substrates. In this study, diamond films were successfully synthesized on high-entropy alloys (HEAs) substrates using microwave plasma chemical vapor deposition. The resulting diamond films were continuous, uniform, and adhered to the HEAs substrates. The mixed carbides were identified using X-ray diffraction, and the quality of the diamond films was examined using Raman spectroscopy. Moreover, the corrosion test revealed that the diamond/TiZrHfMo samples had excellent electrochemical stability and corrosion resistance with a corrosion potential value of −0.169 V in a 3.5wt% NaCl solution. A multiple regression model was established to evaluate the effects of the structure and growth parameters, which confirmed that the mixing entropy significantly affected the grain size and corrosion properties.

Keywords

high-entropy alloy / chemical vapor deposition / diamond film / multiple regression model

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