Influence of Ag content on the microstructure, mechanical, and tribological properties of TaVN–Ag films

Abstract

A series of TaVN–Ag nanocomposite films were deposited using a radio-frequency magnetron sputtering system. The microstructure, mechanical properties, and tribological performance of the films were investigated. The results showed that TaVN–Ag films were composed of face-centered cubic (fcc) TaVN and fcc-Ag. With increasing Ag content, the hardness of TaVN–Ag composite films first increased and then decreased rapidly. The maximum hardness value was 31.4 GPa. At room temperature, the coefficient of friction (COF) of TaVN–Ag films decreased from 0.76 to 0.60 with increasing Ag content from 0 to 7.93at%. For the TaVN–Ag films with 7.93at% Ag, COF first increased and then decreased rapidly from 0.60 at 25°C to 0.35 at 600°C, whereas the wear rate of the film increased continuously from 3.91 × 10⁻⁷ to 19.1 × 10⁻⁷ mm³/(N·mm). The COF of the TaVN–Ag film with 7.93at% Ag was lower than that of the TaVN film, and their wear rates showed opposite trends with increasing temperature.

Keywords

TaVN–Ag films / RF magnetron sputtering / microstructure / mechanical properties / tribological performances

References

[1] Liu C.C., Weng M.H., Wang C.T., Chen J.H., Chou Y.C., Yaw H.W. An investigation of structure and wear properties of TiN/NbN films deposited by reactive magnetron sputtering. Key Eng. Mater., 2008, 368-372, 1310.

[2] Akbazadeh M., Shafyei A., Salimijazi H.R. Comparison of the CrN, TiN and (Ti, Cr)N PVD coatings deposited by cathodic arc evaporation. Iran. J. Mater. Sci. Technol., 2015, 12(1): 43.

[3] Wu Z.W., Zhou F., Wang Q.W., Zhou Z.F., Yan J.W., Li L.K.Y. Influence of trimethylsilane flow on the microstructure, mechanical and tribological properties of CrSiCN coatings in water lubrication. Appl. Surf. Sci., 2015, 355, 516.

[4] Yu L.H., Li Y., Ju H.B., Xu J.H. Microstructure, mechanical and tribological properties of magnetron sputtered VCN films. Surf. Eng., 2017, 33(12): 919.

[5] Ju H.B., Yu L.H., He S., Asemoah I., Xu J.H., Hou Y. The enhancement of fracture toughness and tribological properties of the titanium nitride films by doping yttrium. Surf. Coat. Technol., 2017, 321, 57.

[6] Xu J.H., Ju H.B., Yu L.H. Microstructure, oxidation resistance, mechanical and tribological properties of Mo–Al–N films by reactive magnetron sputtering. Vacuum, 2014, 103, 21.

[7] Hultman L. Thermal stability of nitride thin films. Vacuum, 2000, 57(1): 1.

[8] Lin L.W., Liu B., Ren D., Zhan C.Y., Jiao G.H., Xu K.W. Effect of sputtering bias voltage on the structure and properties of Zr–Ge–N diffusion barrier films. Surf. Coat. Technol., 2013, 228, S237.

[9] Komiyama S., Sutou Y., Oikawa K., Koike J., Wang M., Sakurai M. Wear and oxidation behavior of reactive sputtered d-(Ti,Mo)N films deposited at different nitrogen gas flow rates. Tribol. Int., 2015, 87, 32.

[10] Kumar T.S., Prabu S.B., Manivasagam G., Padmanabhan K.A. Comparison of TiAlN, AlCrN, and AlCrN/TiAlN coatings for cutting-tool applications. Int. J. Miner. Metall. Mater., 2014, 21(8): 796.

[11] Ju H.B., Yu L.H., Yu D., Asempah I., Xu J.H. Microstructure, mechanical and trobological properties of TiN–Ag films deposited by reactive magnetron sputtering. Vacuum, 2017, 141, 82.

[12] Ju H.B., Xu J.H. Microstructure and tribological properties of NbN–Ag composite films by reactive magnetron sputtering. Appl. Surf. Sci., 2015, 355, 878.

[13] Mulligan C.P., Gall D. CrN–Ag self-lubricating hard coatings. Surf. Coat. Technol., 2005, 200(5-6): 1495.

[14] Mulligan C.P., Blanchet T.A., Gall D. CrN–Ag nanocomposite coatings: High-temperature tribological response. Wear, 2010, 269(1-2): 125.

[15] Mulligan C.P., Blanchet T.A., Gall D. CrN–Ag nanocomposite coatings: Tribology at room temperature and during a temperature ramp. Surf. Coat. Technol., 2010, 204(9): 1388.

[16] Aouadi S.M., Singh D.P., Stone D.S., Polychronopoulou K., Nahif F., Rebholz C., Muratore C., Voevodin A.A. Adaptive VN/Ag nanocomposite coatings with lubricious behavior from 25 to 1000°C. Acta Mater., 2010, 58(16): 5326.

[17] Shtansky D.V., Bondarev A.V., Kiryukhantsev-Korneev Ph.V., Rojas T.C., Godinho V., Fernández A. Structure and tribological properties of MoCN–Ag coatings in the temperature range of 25–700°C. Appl. Surf. Sci., 2013, 273, 408.

[18] Laurila T., Zeng K., Kivilahti J.K., Molarius J., Riekkinen T., Suni I. Tantalum carbide and nitride diffusion barriers for Cu metallisation. Microelectron. Eng., 2002, 60(1-2): 71.

[19] Kaushal A., Kaur D. Effect of Mg content on structural, electrical and optical properties of Zn1-xMgxO nanocomposite thin films. Sol. Energy Mater. Sol. Cells, 2009, 93(2): 193.

[20] Zhang H.L., Li J.F., Zhang B.P., Jiang W. Enhanced mechanical properties in Ag-particle-dispersed PZT piezoelectric composites for actuator applications. Mater. Sci. Eng. A, 2008, 498(1-2): 272.

[21] Köstenbauer H., Fontalvo G.A., Mitterer C., Keckes J. Tribological properties of TiN/Ag nanocomposite coatings. Tribol. Lett., 2008, 30(1): 53.

[22] Tan S.Y., Zhang X.H., Wu X.J., Fang F., Jiang J.Q. Effect of copper content and substrate bias on structure and mechanical properties of reactive sputtered CrCuN films. J. Alloys Compd., 2011, 509(3): 789.

[23] Aouadi S.M., Basnyat P., Zhang Y., Ge Q., Filip P. Grain boundary sliding mechanisms in ZrN–Ag, ZrN–Au, and ZrN–Pd nanocomposite films. Appl. Phys. Lett., 2006, 88(2): 741.

[24] Pappacena K.E., Singh D., Ajayi O.O., Routbort J.L., Erilymaz O.L., Demas N.G., Chen G. Residual stresses, interfacial adhesion and tribological properties of MoN/Cu composite coatings. Wear, 2012, 278-279, 62.

[25] Fateh N., Fontalvo G.A., Gassner G.A., Mitterer C. Influence of high-temperature oxide formation on the tribological behaviour of TiN and VN coatings. Wear, 2007, 262(9-10): 1152.

[26] Luo Q. Temperature dependent friction and wear of magnetron sputtered coating TiAlN/VN. Wear, 2011, 271(9-10): 2058.