Synergistic precision microfabrication enabling high-performance multiplexed ceramic MEMS gas sensor arrays with pulse temperature modulation functionality

Abstract

Gas sensing in complex environments requires advanced technologies that overcome the limitations of traditional semiconductor, electrochemical, and optical sensors. This paper presents an integrated micro-manufacturing platform that combines UV lithography, laser etching, and micro-spray deposition to fabricate multiplexed ceramic microelectromechanical system (MEMS) gas sensor array chips with enhanced precision and reliability. The platform optimizes process parameters to ensure high-quality lithography, etching, and film deposition on zirconia ceramic substrates, addressing challenges such as thermal expansion mismatch and gas-sensitive material integration. A 16-element micro-hotplate array chip fabricated using this platform demonstrates rapid temperature modulation, low power consumption, and stable performance in gas sensitivity tests, generating distinctive response “fingerprints” for various volatile organic compounds. This integrated approach offers a promising solution for improved gas detection in applications such as environmental monitoring, industrial safety, and medical diagnostics.

Keywords

ceramic chips / MEMS gas sensors / micro-manufacturing / programmed temperature modulation / VOC detection

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RIGHTS & PERMISSIONS

2025 The Author(s). FlexMat published by John Wiley & Sons Australia, Ltd on behalf of Nanjing University of Posts & Telecommunications.