A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
Chao FANG , Yang XIANG , Ke-qi QI
Front. Inform. Technol. Electron. Eng ›› 2018, Vol. 19 ›› Issue (6) : 809 -814.
A general method of designing phase-shifting algorithms for grating lateral shearing interferometry
We propose a general method of designing phase-shifting algorithms for grating lateral shearing interferometry. The algorithms compensate for the zeroth-order effect error and phase-shifting error in varying degrees. We derive a general expression of the phase-shifting algorithm in grating lateral shearing interferometer and introduce the corresponding design method. Based on the expression and method, four phase-shifting algorithms are designed with different phase-shifting errors to obtain high measurement accuracy. A new 13-frame phase-shifting algorithm is designed and simulated with a large zeroth-order effect. Simulation results verify the general expression and the corresponding design method.
Interferometry / Phase measurement / Phase-shifting algorithms
Zhejiang University and Springer-Verlag GmbH Germany, part of Springer Nature
/
| 〈 |
|
〉 |
PDF
(523KB)
