Frontiers of Electrical and Electronic Engineering >

2007 , Vol. 2 >Issue 1: 83 - 87

DOI: https://doi.org/10.1007/s11460-007-0015-x

A novel MEMS-based focal plane array for infrared imaging

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  • 1.Micro-Processing and Nano-Technology Department, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China; 2.Key Laboratory of Mechanical Behavior and Design of Materials, University of Science and Technology of China, Hefei 230027, China;

Published date: 05 Mar 2007

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Abstract

On the basis of opto-mechanical effect and micro electromechanical system (MEMS) technology, a novel substrate-free focal plane array (FPA) with the thermal isolated structure for uncooled infrared imaging is developed, even as alternate evaporated Au on SiN cantilever is used for thermal isolation. A human thermal image is obtained successfully by using the infrared imaging system composed of the FPA and optical detecting system. The experiment results show that the realization of thermal isolation structure in substrate-free FPA increases the temperature rise of the deflecting leg effectively, whereas the noise equivalent temperature difference (NETD) is about 200 mK.

Cite this article

LI Chaobo, JIAO Binbin, SHI Shali, YE Tianchun, CHEN Dapeng, ZHANG Qingchuan, GUO Zheying, DONG Fengliang, WU Xiaoping . A novel MEMS-based focal plane array for infrared imaging[J]. Frontiers of Electrical and Electronic Engineering, 2007 , 2(1) : 83 -87 . DOI: 10.1007/s11460-007-0015-x

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