Study on precision piezoelectric rotary step motors with inner anchor/loosen and outer drive

Abstract

A new precision rotary piezoelectric (PZT) actuator is proposed to improve its drive performance. Based on piezoelectric technology, the actuator adopts the principle of bionics, with a new method of stator inner anchor/loosen/rotor outer drive and a distortion structure of a thin shelf flexible hinge. This structure improves the stability of the anchor/loosen and step rotary. Its characteristics are evaluated by finite element analysis. The experiment shows that the new rotary PZT actuator works with higher frequency (40 Hz), higher speed (325 ?rad/s), wider movement (360°), high resolution (1 ?rad/step) and high torque (30 N·cm). The novel actuator can be applied in wide movement and high resolution driving devices such as those for optics engineering, precision positioning and some other micro-manipulation fields.

Keywords

piezoelectric element / stator inner anchor/loosen / rotor outer drive / thin shelf flexible hinge / resolution