Recently, efforts have been made to design miniaturized energy storage devices according to custom requirements. The application of micro-electronic equipment has increased significantly in information technology and biotechnology. Microelectromechanical systems, nanoelectromechanical systems, maintenance-free wireless sensor networks, implantable medical devices, micro-robots, and integrating energy conversion devices require micropower sources in small dimensions. Conventional supercapacitor devices cannot fulfill such high-power demand, but miniaturization within the microscale helps enhance the working efficiency due to the shortening of diffusion path length. Micro-supercapacitors (MSCs) in the micron to centimeter dimension range integrated with circuits and microelectronic components have gained great interest due to their high-power density, high-frequency response, and long cycling stability. Research on the design and fabrication of MSCs has progressed enormously. Integrating MSCs with other electronic units helps to achieve a highly efficient self-powered system. This review presents a critical summary of the recent progress of novel materials for MSCs, fabrication methods, advanced design, and challenges in the MSCs industry.
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2024 The Author(s). EcoEnergy published by John Wiley & Sons Australia, Ltd on behalf of China Chemical Safety Association.