Theoretical and experimental study of the evolution of surface textures during wheel polishing with fluid cutting model

Abstract

Metal mirrors with ultra-smooth surfaces have a wide range of applications in X-ray and other optics. The fabrication of X-ray mirrors usually requires high-precision turning and grinding, which has a periodic texture with anisotropic characteristics. To obtain a stable low roughness surface over the full-aperture surface, it is crucial to study the evolution law of these textures during polishing. In this article, a model for the evolution of periodic texture roughness based on contact mechanics and fluid micro-cutting has been established. It was found that the fluid cutting stress caused by the periodic texture orientation had a significant impact on the evolution of roughness. When the orientation of periodic texture is perpendicular to the rotation direction of polishing wheel, the contribution of fluid micro-cutting to the evolution of the roughness reaches its maximum. The evolution speed of surface roughness is the fastest. Polishing experiments using single direction rotating wheel on turned electroless nickel plate were performed to verify the theory. The experimental results were in good agreement with the theoretical results. This work shows that the fluid micro-cutting plays an important role in the evolution of periodic texture roughness. It provides useful guidance for full-aperture polishing of anisotropic textures.

Keywords

Wheel polishing / Anisotropic periodic textures / Roughness evolution law / Fluid cutting model

References

[1] Risse S, Gebhardt A, Damm C et al (2008) Novel TMA telescope based on ultra precise metal mirrors. In: Proc SPIE 7010, space telescopes and instrumentation 2008: optical, infrared, and millimeter, 701016. https://doi.org/10.1117/12.789824

[2] Vukobratovich D, Schaefer JP (2011) Large stable aluminum optics for aerospace applications. In: Proc SPIE 8125, optomechanics 2011: innovations and solutions, 81250T. https://doi.org/10.1117/12.892039

[3] Mimura H, Yamaguchi G, Kume T et al (2020) Advanced fabrication technologies for ultraprecise replicated mirrors for X-ray telescopes. In: Proc SPIE, space telescopes and instrumentation: ultraviolet to Gamma ray, 11444. https://doi.org/10.1117/12.2560892

[4] Chon KS, Namba Y, Yoon KH. Precision machining of electroless nickel mandrel and fabrication of replicated mirrors for a soft X-ray microscope. JSME Int J C-Mech Sy, 2006, 49: 56-62

[5] Guo J, Takeda S, Morita SY, et al. . New fabrication method for an ellipsoidal neutron focusing mirror with a metal substrate. Opt Express, 2014, 22: 24666-24677

[6] Namba Y, Shimomura T, Fushiki A, et al. . Ultra-precision polishing of electroless nickel molding dies for shorter wavelength applications. CIRP Ann-Manuf Techn, 2008, 57: 337-340

[7] Zhu ZW, To S, Zhang SJ. Active control of residual tool marks for freeform optics functionalization by novel biaxial servo assisted fly cutting. Appl Opt, 2015, 54: 7656-7662

[8] Zhu ZW, Zhou XQ, Luo D, et al. . Development of pseudo-random diamond turning method for fabricating freeform optics with scattering homogenization. Opt Express, 2013, 21: 28469-28482

[9] Zhao D, Lu X. Chemical mechanical polishing: theory and experiment. Friction, 2013, 1(4): 306-326

[10] Lee H, Lee D, Jeong H. Mechanical aspects of the chemical mechanical polishing process: a review. Int J Precis Eng Man, 2016, 17: 525-536

[11] Hsieh CH, Chang CY, Hsiao YK, et al. . Recent advances in silicon carbide chemical mechanical polishing technologies. Micromachines, 2022, 13: 1752

[12] Srinivasa-Murthy C, Wang D, Beaudoin SP, et al. . Stress distribution in chemical mechanical polishing. Thin Solid Films, 1997, 308: 533-537

[13] Jones RA. Computer-controlled grinding of optical surfaces. Appl Opt, 1982, 21: 874-877

[14] Walker DD, Brooks D, King A, et al. . The 'Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces. Opt Express, 2003, 11: 958-964

[15] Wu ZW, Shen JY, Peng YF, et al. . Review on ultra-precision bonnet polishing technology. Int J Adv Manuf Tech, 2022, 121: 2901-2921

[16] Song JF, Yao YX, Xie DG, et al. . Experimental research on polishing spot of bonnet polishing. Appl Mech Mater, 2008, 10: 385-389

[17] Pan R, Zhang YJ, Ding JB, et al. . Optimization strategy on conformal polishing of precision optics using bonnet tool. Int J Precis Eng Man, 2016, 17: 271-280

[18] Wang YJ, Yao YS, Xu L, et al. . Alleviation of honeycomb print-through of NiP/Cu coated carbon fiber composite mirror via robot-arm wheel polishing. Mater Chem Phys, 2022, 283 126028

[19] Zhang PF, Jing Z, Goel S, et al. . Theoretical and experimental investigations on conformal polishing of microstructured surfaces. Int J Mech Sci, 2024, 268 109050

[20] Lu A, Guo K, Jin T, et al. . Modeling and experimentation of dynamic material removal characteristics in dual-axis wheel polishing. Int J Mech Sci, 2019, 151: 523-536

[21] Xu C, Peng XQ, Liu JF, et al. . A high efficiency and precision smoothing polishing method for NiP coating of metal mirror. Micromachines, 2022, 13: 1171

[22] Jones RA. Grinding and polishing with small tools under computer control. Opt Eng, 1979, 18: 390-393

[23] Cheng HB, Dong ZC, Ye X, et al. . Subsurface damages of fused silica developed during deterministic small tool polishing. Opt Express, 2014, 22: 18588-18603

[24] Kim DW, Park WH, Kim SW, et al. . Parametric modeling of edge effects for polishing tool influence functions. Opt Express, 2009, 17: 5656-5665

[25] Liang Z, Bin X, Ansu W (2016) Modeling and simulation of wheeled polishing method for aspheric surface. In: Proc SPIE 9683, the 8th international symposium on advanced optical manufacturing and testing technologies: advanced optical manufacturing technologies, 968313. https://doi.org/10.1117/12.2241493

[26] Yao YS, Ma Z, Ding JT et al (2020) Optimization of polishing wheel and investigation of its tool influence function. In: Proc SPIE, conference on applied optics and photonics China, 1156819. https://doi.org/10.1117/12.2579896.

[27] Yao YS, Li QX, Ding J, et al. . Investigation of an influence function model as a self-rotating wheel polishing tool and its application in high-precision optical fabrication. Appl Sci, 2022, 12: 3296

[28] Seo H, Han JY, Kim SW, et al. . Novel orthogonal velocity polishing tool and its material removal characteristics from CVD SiC mirror surfaces. Opt Express, 2016, 24: 12349-12366

[29] Luo JF, Dornfeld DA. Material removal mechanism in chemical mechanical polishing: theory and modeling. IEEE T Semiconduct M, 2001, 14: 112-133

[30] Zhao YW, Chang L. A micro-contact and wear model for chemical-mechanical polishing of silicon wafers. Wear, 2002, 252(3/4): 220-226

[31] Jin XL, Zhang LC. A statistical model for material removal prediction in polishing. Wear, 2012, 274(275): 203-211

[32] Qin K, Moudgil B, Park CW. A chemical mechanical polishing model incorporating both the chemical and mechanical effects. Thin Solid Films, 2004, 446(2): 277-286

[33] Yao WF, Chu QQ, Lyu BH, et al. . Modeling of material removal based on multi-scale contact in cylindrical polishing. Int J Mech Sci, 2022, 223 107287

[34] Peng WM, Jiang L, Huang CP, et al. . Surface roughness evolution law in full-aperture chemical mechanical polishing. Int J Mech Sci, 2024, 277 109387

[35] Hou J, Lei P, Liu S, et al. . A predictable smoothing evolution model for computer-controlled polishing. J Eur Opt Soc-Rapid, 2020, 16(1): 23

[36] Kim DW, Burge JH. Rigid conformal polishing tool using non-linear viscoelastic effect. Opt Express, 2010, 18: 2242-2257

[37] Kim DW, Park WH, An HK, et al. . Parametric smoothing model for visco-elastic polishing tools. Opt Express, 2010, 18: 22515-22526

[38] Nie XQ, Li SY, Shi F, et al. . Generalized numerical pressure distribution model for smoothing polishing of irregular midspatial frequency errors. Appl Opt, 2014, 53(6): 1020-1027

[39] Ma WH, Li JH, Hou X. Profile prediction and analysis in active controlled elastic emission machining. Int J Mech Sci, 2024, 275 109274

[40] Ma WH, Li JH, Hou X. Rolling model analysis of material removal in elastic emission machining. Int J Mech Sci, 2023, 258 108572

[41] Sundararajan S, Thakurta DG, Schwendeman DW, et al. . Two-dimensional wafer-scale chemical mechanical planarization models based on lubrication theory and mass transport. J Electrochem Soc, 1999, 146(2): 761-766

[42] Zhu WL, Beaucamp A. Generic three-dimensional model of freeform surface polishing with non-Newtonian fluids. Int J Mech Sci, 2022, 172 103837

[43] Yao WF, Lyu BH, Zhang TQ, et al. . Effect of elastohydrodynamic characteristics on surface roughness in cylindrical shear thickening polishing process. Wear, 2023, 530(531): 205026

[44] Kim TW, Cho YJ. Average flow model with elastic deformation for CMP. Tribol Int, 2006, 39(11): 1388-1394

[45] Tichy J, Levert JA, Shan L, et al. . Contact mechanics and lubrication hydrodynamics of chemical mechanical polishing. J Electrochem Soc, 1999, 146(4): 1523-1528

[46] Du CY, Dai YF, Guan CL, et al. . High efficiency removal of single point diamond turning marks on aluminum surface by combination of ion beam sputtering and smoothing polishing. Opt Express, 2021, 29(3): 3738-3753

[47] Zhang H, Zhang XD, Li ZX, et al. . Removing single-point diamond turning marks using form-preserving active fluid jet polishing. Precis Eng, 2022, 76: 237-254

[48] Xie YH, Bhushan B. Effects of particle size, polishing pad and contact pressure in free abrasive polishing. Wear, 1996, 200(1/2): 281-295

Funding

National Key Research and Development Program of China(No. 2023YFA1608600)

National Natural Science Foundation of China(No.12235011)

RIGHTS & PERMISSIONS

Shanghai University and Periodicals Agency of Shanghai University and Springer-Verlag GmbH Germany, part of Springer Nature