High-precision two-dimensional figuring of X-ray mirrors using an elliptical ion beam in a single-axis motion system

Rong Wang; Qiu-Shi Huang; Qiao-Yu Wu; Wen-Wen Zhang; Jun Yu; Zhong Zhang; Zhan-Shan Wang

doi:10.1007/s40436-025-00591-8

Advances in Manufacturing ›› :1 -18. DOI: 10.1007/s40436-025-00591-8

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High-precision two-dimensional figuring of X-ray mirrors using an elliptical ion beam in a single-axis motion system

Rong Wang ¹^,²^,³
, Qiu-Shi Huang ¹^,²^,³^,⁴^,^a
, Qiao-Yu Wu ¹^,²^,³
, Wen-Wen Zhang ¹^,²^,³
, Jun Yu ¹^,²^,³
, Zhong Zhang ¹^,²^,³
, Zhan-Shan Wang ¹^,²^,³^,^b

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¹Key Laboratory of Advanced Micro-Structured Materials, Ministry of Education, Institute of Precision Optical Engineering (IPOE), School of Physics Science and Engineering, Tongji University, 200092, Shanghai, People’s Republic of China

²Shanghai Professional Technical Service Platform for Full-Spectrum and High-Performance Optical Thin Film Devices and Applications, Tongji University, 200092, Shanghai, People’s Republic of China

³Shanghai Frontiers Science Center of Digital Optics, Tongji University, 200092, Shanghai, People’s Republic of China

⁴, Zhejiang Tongyue Optical Technology Co., Ltd., 313199, Huzhou, Zhejiang, People’s Republic of China

^a huangqs@tongji.edu.cn

^b wangzs@tongji.edu.cn

Rong Wang

Rong Wang is a Ph.D. student in Optics at Tongji University, China. He received his B.S. (2021) from Tongji University, China. His research interests include ion beam figuring and metrology of X-ray mirrors.

Qiu-Shi Huang

Qiu-Shi Huang is a professor in Optics at Tongji University, China. He received his Ph.D. from Tongji University, China, in 2012. His research interests are extreme ultraviolet and X-ray optics.

Qiao-Yu Wu

Qiao-Yu Wu received his Ph.D. (2024) in Optics from Tongji University, China. His research interests include simulation and measurement of high-precision X-ray mirrors.

Wen-Wen Zhang

Wen-Wen Zhang is a Ph.D. student in Optics at Tongji University, China. He received his B.S. (2022) from Tongji University, China. His research interests include simulation and measurement of high-precision X-ray mirrors.

Jun Yu

Jun Yu is an assistant professor in Optics at Tongji University, China. He received his Ph.D. from Tongji University, China, in 2019. His research interests are freeform surface optical systems, ultra-precision optical machining, and detection.

Zhong Zhang

Zhong Zhang is a Professor of Optics at Tongji University, China. His research focuses on neutron and X-ray multilayer optics and optical systems.

Zhan-Shan Wang

Zhan-Shan Wang is a professor of Optics at Tongji University, China. His research interests include extreme ultraviolet radiation, X-rays, and neutron optics.

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Abstract

A high-precision and efficient method is developed to correct the two-dimensional (2D) surface topography of X-ray mirrors using an elliptical beam spot and a single-axis ion beam figuring (IBF) system. Compared with conventional circular beam spots, the smaller tangential size of the elliptical beam spot enables a higher cut-off frequency and improved figuring correction precision in the tangential direction. The larger sagittal size reduces the number of scanning lines and the figuring time required to complete a relatively wide X-ray mirror. As a first demonstration, elliptical Gaussian-shaped beam spots are generated using specially designed elliptical holes and a broad ion beam source. A mirror with 380 mm × 40 mm optical surface clear aperture is figured using the proposed method. After fast correction using a large circular beam function of σ = 10 mm and fine correction using an elliptical beam function of σ_tan = 2 mm/σ_sag = 5 mm, the 2D height error is significantly reduced from 14.5 nm to 1.2 nm (root mean square error). The tangential slope error reaches 384 nrad, which can be further improved. The IBF method with a non-spherical spot can be applied to the manufacturing of many other mirrors that have different requirements in two dimensions with high convergence efficiency.

Keywords

Ion beam figuring (IBF) / Elliptical Gaussian beam spot / Long X-ray mirror / Power spectral density (PSD) analysis

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Rong Wang, Qiu-Shi Huang, Qiao-Yu Wu, Wen-Wen Zhang, Jun Yu, Zhong Zhang, Zhan-Shan Wang. High-precision two-dimensional figuring of X-ray mirrors using an elliptical ion beam in a single-axis motion system. Advances in Manufacturing 1-18 DOI:10.1007/s40436-025-00591-8

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