Two-dimensional precise figuring of 500 mm-long X-ray mirror using one-dimensional ion beam system

Abstract

In this study, a new method was developed to realize two-dimensional (2D) figure correction of grazing-incidence X-ray mirrors using a one-dimensional (1D) ion-beam figuring system. A mask of holes was specifically designed to generate removal functions at different widths and extend the figuring capability over a wide area. Accordingly, a long mirror could be manufactured. Using this method, the surface height root-mean-square (RMS) error of the center area of 484 mm ×16 mm was reduced from 11.49 nm to 2.01 nm, and the 1D meridional RMS error reached 1.0 nm. The proposed method exhibits high precision and cost effectiveness for production of long X-ray mirrors.

Keywords

Long-size mirrors / Ion beam figuring / Two-dimensional figure correction / Mask

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Funding

National Key R&D Program of China(2022YFF0709101)

National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809(12235011)