Fabrication of micro pin fins on inclined V-shaped microchannel walls via laser micromilling

Da-Xiang Deng, Jian Zheng, Xiao-Long Chen, Guang Pi, Yong-Heng Liu

Advances in Manufacturing ›› 2022, Vol. 10 ›› Issue (2) : 220-234.

Advances in Manufacturing ›› 2022, Vol. 10 ›› Issue (2) : 220-234. DOI: 10.1007/s40436-021-00382-x
Article

Fabrication of micro pin fins on inclined V-shaped microchannel walls via laser micromilling

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Abstract

A laser-micromilling process was developed for fabricating micro pin fins on inclined V-shaped microchannel walls for enhanced microchannel heat sinks. A pulsed nanosecond fiber laser was utilized. The feasibility and mechanism of the formation of micro pin fins on inclined microchannel walls were investigated for a wide range of processing parameters. The effects of the laser output power, scanning speed, and line spacing on the surface morphologies and geometric sizes of the micro-pin fins were comprehensively examined, together with the material removal mechanisms. Micro pin fins with acute cone tips were readily formed on the V-shaped microchannel walls via the piling of recast layers and the downflow of re-solidified materials in the laser-ablation process. The pin-fin height exhibited an increasing trend when the scanning speed increased from 100 mm/s to 300 mm/s, and it decreased continuously when the line spacing increased from 5 μm to 20 μm. The optimal processing parameters for preparing micro pin fins on V-shaped microchannels were found to be a laser output power of 21 W, scanning speed of 100–300 mm/s, and line spacing of 2–5 μm. Moreover, the V-shaped microchannels with micro pin fins induced a 7%–538% boiling heat-transfer enhancement over their counterpart without micro pin fins.

Keywords

Laser micromilling / Micro pin fins / Microchannels / Inclined walls / Laser ablation

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Da-Xiang Deng, Jian Zheng, Xiao-Long Chen, Guang Pi, Yong-Heng Liu. Fabrication of micro pin fins on inclined V-shaped microchannel walls via laser micromilling. Advances in Manufacturing, 2022, 10(2): 220‒234 https://doi.org/10.1007/s40436-021-00382-x

References

[1.]
Zhang X, Li RC, Zheng Q. Analysis and simulation of high-power LED array with microchannel heat sink. Adv Manuf, 2013, 1: 191-195.
CrossRef Google scholar
[2.]
Hwang J, Cho YH, Park MS, et al. Microchannel fabrication on glass materials for microfluidic devices. Int J Prec Eng Manuf, 2019, 20: 479-495.
CrossRef Google scholar
[3.]
He Z, Saw LH, Yan Y, et al. Thermal management and temperature uniformity enhancement of electronic devices by micro heat sinks: a review. Energy, 2021, 216.
CrossRef Google scholar
[4.]
Deng D, Zeng L, Sun W. A review on flow boiling enhancement and fabrication of enhanced microchannels of microchannel heat sinks. Int J Heat Mass Transfer, 2021, 175: 121-332.
CrossRef Google scholar
[5.]
Tuckerman DB, Pease R. High-performance heat sinking for VLSI. IEEE Electron Device Lett, 1981, 2: 126-129.
CrossRef Google scholar
[6.]
Zhao W, Iqbal A, Fang D, et al. Experimental study on the meso-scale milling of tungsten carbide WC-17.5Co with PCD end mills. Adv Manuf, 2020, 8: 230-241.
CrossRef Google scholar
[7.]
Prakash S, Kumar S. Fabrication of microchannels: a review. Proc IMechE B J Eng Manuf, 2015, 229: 1273-1288.
CrossRef Google scholar
[8.]
Deng D, Xie Y, Chen L, et al. Experimental investigation on laser micromilling of SiC microchannels. Int J Adv Manuf Technol, 2019, 101: 9-21.
CrossRef Google scholar
[9.]
Marschewski J, Brechbühler R, Jung S, et al. Significant heat transfer enhancement in microchannels with herring bone-inspired microstructures. Int J Heat Mass Tranf, 2016, 95: 755-764.
CrossRef Google scholar
[10.]
Yang F, Alwazzan M, Li W, et al. Single- and two-phase thermal transport in microchannels with embedded staggered herringbone mixers. J Microelectromech Syst, 2014, 23: 1346-1358.
CrossRef Google scholar
[11.]
Deng D, Wan W, Qin Y, Zhang J, Chu X. Flow boiling enhancement of structured microchannels with micro pin fins. Int J Heat Mass Transf, 2017, 105: 338-349.
CrossRef Google scholar
[12.]
Krishnamurthy S, Peles Y. Flow boiling heat transfer on micro pin fins entrenched in a microchannel. ASME J Heat Transf, 2010, 132.
CrossRef Google scholar
[13.]
Zhu Y, Antao DS, Chu K, Chen S, et al. Surface structure enhanced microchannel flow boiling. ASME J Heat Trans, 2016, 138.
CrossRef Google scholar
[14.]
Kosar A, Peles Y. Micro scale pin fin heat sinks: parametric performance evaluation study. IEEE Trans Comp Packag Technol, 2007, 30: 855-865.
CrossRef Google scholar
[15.]
Li X, Seo H, Um H, et al. A periodic array of silicon pillars fabricated by photoelectrochemical etching. Electrochim Acta, 2009, 54: 6978-6982.
CrossRef Google scholar
[16.]
Ho CH, Chin KP, Yang CR, et al. Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots. Sens Actuator A Phys, 2002, 102: 130-138.
CrossRef Google scholar
[17.]
Debnath T, Patowari PK. Fabrication of an array of micro-fins using wire-EDM and its parametric analysis. Mater Manuf Process, 2019, 34: 580-589.
CrossRef Google scholar
[18.]
Natsu W, Kurahata D. Influence of ECM pulse conditions on WC alloy micro-pin fabrication. Procedia CIRP, 2013, 6: 401-406.
CrossRef Google scholar
[19.]
Dede EM, Joshi SN, Zhou F. Topology optimization, additive layer manufacturing, and experimental testing of an air-cooled heat sink. ASME J Mech Des, 2015, 137: 111-403.
CrossRef Google scholar
[20.]
Wong M, Owen I, Sutcliffe CJ, et al. Convective heat transfer and pressure losses across novel heat sinks fabricated by selective laser melting. Int J Heat Mass Transf, 2009, 52: 281-288.
CrossRef Google scholar
[21.]
Jasperson BA, Jeon Y, Turner KT, et al. Comparison of micro-pin-fin and microchannel heat sinks considering thermal-hydraulic performance and manufacturability. IEEE Trans Comp Packag Technol, 2010, 33: 148-160.
CrossRef Google scholar
[22.]
Campanelli SL, Ludovico AD, Bonserio C, et al. Experimental analysis of the laser milling process parameters. J Mater Process Technol, 2007, 191: 220-223.
CrossRef Google scholar
[23.]
Liang L, Lu L, Xing D, et al. Preparation of superhydrophobic and anti-resin-adhesive surfaces with micronanoscale structures on high-speed steel via laser processing. Surf Coat Technol, 2019, 357: 57-68.
CrossRef Google scholar
[24.]
Pan C, Chen K, Liu B, et al. Fabrication of micro-texture channel on glass by laser-induced plasma-assisted ablation and chemical corrosion for microfluidic devices. J Mater Process Technol, 2017, 240: 314-323.
CrossRef Google scholar
[25.]
Smuk AY, Lawandy NM. Direct laser fabrication of dense microlens arrays in semiconductor-doped glass. J Appl Phys, 2000, 87: 4026-4030.
CrossRef Google scholar
[26.]
Das AK. Laser direct writing polymeric single-mode waveguide devices with a rib structure. Appl Opt, 2003, 42: 1236-1243.
CrossRef Google scholar
[27.]
Lee SW, Shin HS, Chu CN. Fabrication of micro-pin array with high aspect ratio on stainless steel using nanosecond laser beam machining. Appl Surf Sci, 2013, 264: 653-663.
CrossRef Google scholar
[28.]
Zhou W, Song R, Pan X, et al. Fabrication and impedance measurement of novel metal dry bioelectrode. Sensor Actuator A Phys, 2013, 201: 127-133.
CrossRef Google scholar
[29.]
Deng D, Wan W, Huang Q, et al. Investigations on laser micromilling of circular micro pin fins for heat sink cooling systems. Int J Adv Manuf Technol, 2016, 87: 151-164.
CrossRef Google scholar
[30.]
Nieto D, Arines J, Gomez-Reino C, et al. Fabrication and characterization of microlens arrays on soda-lime glass using a combination of laser direct-write and thermal reflow techniques. J Appl Phys, 2011, 110: 23108.
CrossRef Google scholar
[31.]
Delgado T, Nieto D, Flores-Arias MT. Fabrication of microlens arrays on soda-lime glass using a laser direct-write technique and a thermal treatment assisted by a CO2 laser. Opt Laser Eng, 2015, 73: 1-6.
CrossRef Google scholar
[32.]
Park JW, Kim H, Kim JG, et al. Fabrication of various shaped tungsten micro pin arrays using micro carving technology. Prec Eng, 2017, 47: 389-396.
CrossRef Google scholar
[33.]
Kam DH, Shah L, Mazumder J. Femtosecond laser machining of multi-depth microchannel networks onto silicon. J Micromech Microeng, 2011, 21: 45027.
CrossRef Google scholar
[34.]
Ding Y, Yang L, Hong M. Enhancement of pulsed laser ablation assisted with continuous wave laser irradiation. Sci China Phys Mech Astron, 2019, 62.
CrossRef Google scholar
[35.]
Mishra S, Yadava V. Laser beam micro machining (LBMM): a review. Opt Laser Eng, 2015, 73: 89-122.
CrossRef Google scholar
[36.]
Li H, Li T, Wang X, et al. Study on the influence of the inclined substrate to the energy distribution of laser cladding. Appl Laser, 2017, 37: 333-339.
[37.]
Saklakoglu IE, Kasman S. Investigation of micro-milling process parameters for surface roughness and milling depth. Int J Adv Manuf Tech, 2011, 54: 567-578.
CrossRef Google scholar
[38.]
Deng D, Wan W, Xie Y, et al. Fabrication of porous copper surfaces by laser micromilling and their wetting properties. Prec Eng, 2017, 49: 428-439.
CrossRef Google scholar
Funding
National Natural Science Foundation of China http://dx.doi.org/10.13039/501100001809(51775464)

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