Surface roughness measurement and analysis of mechanical parts based on digital holography

Abstract

We measure the surface roughness of the mechanical parts based on digital holography. A digital off-axis hologram recording setup for reflective samples is built. Firstly, the height reconstruction error 2.3% of the setup is calibrated by using the quartz step height standard (VLSI-SHS-880QC). Then, the standard scribed-line model and the grinding roughness specimen are selected as the test samples and their surface roughness are 0.095 6 μm and 0.025 3 μm, with errors 6.3%, 0.9%, respectively. The results are in good agreement with the given roughness parameters. At last, we also analyze the window effect of the filter on the roughness measurement value based on digital holography. In conclusion, the paper demonstrated effectively that the digital holography could provide the surface feature for the roughness measurement with high accuracy.

Keywords

Digital holography / Digital off-axis hologram / Roughness measurement / Frequency filter window

References

[1] Ling LX, Pei FC, Ying W, et al. Three-dimensional measuring technique for surface topography using a light-sectioning microscope. Appl Opt, 2012, 8: 1162-1170.

[2] Jian CW. Summary of surface toughness measurement technology. High Vocat Educ, 2008, 5: 76-78.

[3] Xiao MX, Hong H. Development of non-contact surface roughness measurement in last decade. IEEE Int Conf Meas Technol Mechatron Autom, 2009, 584: 210-213.

[4] Chun XL, Qing RD, Hai XL. Measurement of surface parameters from autocorrelation function of speckles in deep Fresnel region with microscopic imaging system. Opt Exp, 2010, 2: 1302-1312.

[5] Yatafai T, Chiang FP. Automatic fringe analysis for moiré topography. Opt Laser Eng, 1982, 3: 73-83.

[6] Takeda M, Mutoh K. Fourier transform profilometry of 3D diffuse objects by spatial phase detection. Appl Opt, 1986, 16: 30-35.

[7] Windecker R, Tiziani HJ. Tonometry of technical and biological objects by fringe projection. Appl Opt, 1995, 36: 44-50.

[8] WindeckerP FranzS, Tiziani HJ. Optical roughness measurement with fringe projection. Appl Opt, 1999, 28: 37-42.

[9] Dai YZ, Chiang FP. Contouring by moiré interferometry. Exp Mech, 2000, 31: 76-81.

[10] Zhang H, Wu F. Spatiotemporal phase unwrapping and its application in fringe projection fiber optics phase-shifting profilometry. Opt Eng, 2000, 19: 58-64.

[11] Manojlovic LM, Zivanov MB, Marincic AS. White-light interferometry sensor for rough surface height distribution measurement. IEEE Sens J, 2010, 6: 1125-1132.

[12] Metchkarov N. High-accuracy surface measurement using laser-diode phase-stepping interferometry. Vacuum, 2000, 58: 464-469.

[13] Michael Z. High speed surface measurement with lateral scanning-white light interferometry, 2002, Town of Oyster Bay: Veeco Instruments Inc.

[14] Dirksen D, Droste H, Kemper B. Lensless Fourier holography for digital holographic interferometry on biological samples. Opt Laser Eng, 2001, 2: 1-9.

[15] Tankam P, Picart P. Use of digital color holography for crack investigation in electronic components. Opt Laser Eng, 2012, 49: 1335-1342.

[16] Mosarraf H, Chandra S. Temperature measurement in laminar free convective flow using digital holography. Appl Opt, 2009, 10: 1869-1877.

[17] Weidong Y, Alexander BK, Raymond AS. Phase signature for particle detection with digital in-line holography. Opt Lett, 2006, 10: 1309-1401.

[18] Taslima K, Mohammad NR, Arvind R. Accurate size measurement of needle-shaped particles using digital holography. Chem Eng Sci, 2011, 12: 2699-2706.

[19] Majinyang S, Constance KTT, Ruojin D. Thickness and roughness measurement using a reflective digital holographic microscope. Proc SPIE, 2010, 7522: 7522671-9

[20] Lei X, Peng XY, Jian NM, et al. Studies of digital microscopic holography with application to microstructure testing. Appl Opt, 2001, 28: 5046-5051.

[21] Li HM, Hui W, Yong L, et al. Numerical reconstruction of digital hologram for three-dimensional shape measurement. Appl Opt, 2004, 6: 396-400.

[22] Schnars U, Juptner W. Digital recording and numerical reconstruction of holograms. Meas Sci Technol, 2002, 13: R85-R101.

[23] Guang JW (2011) Study on digital holography and its applications in the field of measurement. Dissertation, Beijing University of Technology

Funding

The Young Scientists Fund of the Natural Science Foundation of China(No.61107004)