Experimental investigation into fabrication of microfeatures on titanium by electrochemical micromachining

Abstract

Titanium machining is one of the challenging tasks to modern machining processes. Especially fabricating microfeatures on titanium appear as a potential research interest. Electrochemical micromachining (EMM) is an effective process to generate microfeatures by anodic dissolution. Machining of titanium by anodic dissolution is different than other metals because of its tendency to form passive oxide layer. The phenomenon of progression of microfeature by conversion of passive oxide layer into transpassive has been investigated with the help of maskless EMM technique. Suitable range of machining voltage has been established to attain the controlled anodic dissolution of titanium by converting passive oxide film of titanium into transpassive with nonaqueous electrolyte. The experimental outcomes revealed that the micromachining of titanium with controlled anodic dissolution could be possible even at lower machining voltage in the range of 6–8 V. This work successfully explored the possibility of generation of microfeatures on commercially pure titanium by anodic dissolution process in microscopic domain by demonstrating successful fabrication of various microfeatures, such as microholes and microcantilevers.

Keywords

Titanium machining / Electrochemical micromachining (EMM) / Anodic dissolution / Current density / Current efficiency

References

[1] Jain VK, Kalia S, Sidpara A, et al. Fabrication of micro-features and micro-tools using electrochemical micromachining. Int J Adv Manuf Technol, 2012, 61: 1175-1183.

[2] Zhang Z, Zhu D, Qu N. Theoretical and experimental investigation on electrochemical micromachining. Microsyst Technol, 2007, 13: 607-612.

[3] Malapati M, Bhattacharyya B. Investigation into electrochemical micromachining process during micro-channel generation. Mater Manuf Process, 2011, 26: 1019-1027.

[4] Yang X, Liu CR. Machining titanium and its alloys. Mach Sci Technol, 1999, 3(1): 107-139.

[5] Ezugwu EO, Wang ZM. Titanium alloys and their machinability-a review. J Mater Process Technol, 1997, 68: 262-274.

[6] Kumar J, Khamba JS, Mohapatra SK. An investigation into the machining characteristics of titanium using ultrasonic machining. Int J Mach Mach Mater, 2008, 3(1–2): 143-161.

[7] Lin YC, Yan BH, Chang YS. Machining characteristics of titanium alloy (Ti6Al4V) using a combination process of EDM with USM. J Mater Process Technol, 2000, 104: 171-177.

[8] Dhobe SD, Doloi B, Bhattacharyya B. Surface characteristics of ECMed titanium work samples for biomedical applications. Int J Adv Manuf Technol, 2011, 55: 177-188.

[9] Dyaminov RD, Mal’tsev AN, Kargin GV. Electrochemical machining of titanium-rotor cast blades for vortex pumps. Chem Pet Eng, 1977, 13(9): 817-818.

[10] Aladjem A. Anodic oxidation of titanium and its alloys. J Mater Sci, 1973, 8: 688-704.

[11] Zinger O, Chauvy PF, Landolt D. Scale-resolved electrochemical surface structuring of titanium for biological applications. J Electrochem Soc, 2003, 150(11B): 495-503.

[12] Landolt D, Chauvy PF, Zinger O. Electrochemical micromachining, polishing and surface structuring of metals: fundamental aspects and new developments. Electrochem Acta, 2003, 48: 3185-3201.

[13] Bannard J. On the electrochemical machining of some titanium alloys in bromide electrolytes. J Appl Electrochem, 1976, 6: 477-483.

[14] Madore C, Landolt D. Electrochemical micromachining of controlled topographies on titanium for biological applications. J Micromech Microeng, 1997, 7: 270-275.

[15] Sjöström T, Su B. Micropatterning of titanium surfaces using electrochemical micromachining with an ethylene glycol electrolyte. Mater Lett, 2011, 65: 3489-3492.

[16] De Silva AKM, Altena HSJ, McGeough JA. Precision ECM by process characteristic modeling. Ann CIRP, 2000, 49(1): 151-156.

[17] Ghoshal B, Bhattacharyya B. Influence of vibration on micro-tool fabrication by electrochemical machining. Int J Mach Tool Manuf, 2013, 64: 49-59.

[18] Rathod V, Doloi B, Bhattacharyya B. Sidewall insulation of microtool for electrochemical micromachining to enhance the machining accuracy. Mater Manuf Process, 2014, 29: 305-313.