Dynamic characteristics of ultra-precision aerostatic bearings

Abstract

With high acceleration and ultra-precision requirements, the design of aerostatic bearings has been gradually focused on their dynamic performances. In this paper, the dynamic stiffness and damping coefficients of aerostatic bearings are investigated. Due to compressibility of the gas, the dynamic characteristics of aerostatic bearings show nonlinear frequency dependence. Particularly, their nonlinear dynamic behaviors are quite remarkable for ultra-precision aerostatic bearings with small air gap heights and high supply pressure.

Keywords

Aerostatic bearing / Dynamic characteristics / Dynamic mesh

References

[1] Fourka M, Tian Y, Bonis M. Prediction of the stability of air thrust bearings by numerical, analytical and experimental methods. Wear, 1996, 198(1/2): 1-6.

[2] Mukai T. Analysis of dynamic characteristics of air bearing. Nippon Steel Tech Rep, 2006, 93: 15-17.

[3] Otsu Y, Miyatake M, Yoshimoto S. Dynamic characteristics of aerostatic porous journal bearings with a surface restricted layer. J Tribol, 2011, 133: 1-10.

[4] Miyatake M, Yoshimoto S. Numerical investigation of static and dynamic characteristics of aerostatic thrust bearings with small feed holes. Tribol Int, 2010, 43: 1353-1359.

[5] Arghir M, Matta P. Compressibility effects on the dynamic characteristics of gas lubricated mechanical components. Comptes Rendus Mécanique, 2009, 337(11/12): 739-747.

[6] Bhat N, Kumar S, Tan W, et al. Performance of inherently compensated flat pad aerostatic bearings subject to dynamic perturbation forces. Precis Eng, 2012, 36(3): 399-407.

[7] Karniadakis G, Beskok A, Aluru N. Microflows and nanoflows: fundamentals and simulation, 2005, New York: Springer.