The Films with Low Dielectric Permittivity on the Basis of Lyotropic Liquid Crystals

A A Sonin

doi:10.17816/2074-0530-70008

Izvestiya MGTU MAMI ›› 2009, Vol. 3 ›› Issue (1) : 185 -192. DOI: 10.17816/2074-0530-70008

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The Films with Low Dielectric Permittivity on the Basis of Lyotropic Liquid Crystals

A A Sonin

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Abstract

The possibility of preparation of solid porous films with low dielectric constant for use in nanoelectronics was demonstrated on example of the CTAB/TEOS/NaSal and CTAB/TEOS/TCS-2 novel precursor solutions. The dielectric constant and mechanical modules of these films were measured. The possibility of use of supercritical CO2 for improvement of the film characteristics was shown.

Keywords

dielectric constant / insulating gap / electric signal propagation velocity / percussion solution / hexamethyldisilazane

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A A Sonin. The Films with Low Dielectric Permittivity on the Basis of Lyotropic Liquid Crystals. Izvestiya MGTU MAMI, 2009, 3(1): 185-192 DOI:10.17816/2074-0530-70008

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