Experience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech)
V A Vasin
Izvestiya MGTU MAMI ›› 2008, Vol. 2 ›› Issue (1) : 212 -229.
Experience in the Creation and Implementation of complex industry vacuum systems (based on devices and component parts eliminating movement friction and designed to work in the field of micro-and nano-electronics and other high-tech)
The article is devoted to creation of executive and switch complexes of vacuum technological equipment and contains the review of both the most widespread and the most prospective devices based on the principle of controlled elastic deformation.
vacuum technology equipment / the principle of controlled elastic deformation
Vasin V.A.
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