Ellipsometric control of the thickness of the film of silicon carbide on the basis polymetylmetacrylate

A. P Voronov; Igor Anatolievich Voronov; E. A Mitrofanov

doi:10.17816/dent.39332

Russian Journal of Dentistry ›› 2015, Vol. 19 ›› Issue (1) : 24 -26. DOI: 10.17816/dent.39332

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Ellipsometric control of the thickness of the film of silicon carbide on the basis polymetylmetacrylate

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Abstract

By experimental measurements caused by ion-plasma sputtering of thin films of SiC has been shown that the ellipsometric measurement ofparameters of thin films are accurate and reliable method of control of technological process ofmanufacturing of complex composite coatings, so you can choose the time of coating to obtain a desired thickness.

Keywords

silicon carbide / ellipsometrichesky researches / sheeting

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A. P Voronov, Igor Anatolievich Voronov, E. A Mitrofanov. Ellipsometric control of the thickness of the film of silicon carbide on the basis polymetylmetacrylate. Russian Journal of Dentistry, 2015, 19(1): 24-26 DOI:10.17816/dent.39332

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