Off-Axis Co-Optical Path Large-Range Line Scanning Chromatic Confocal Sensor

Abstract

This article proposes a line scanning chromatic confocal sensor to solve the problem of limited chromatic confocal measurement due to the small measurement range and low measurement efficiency in the industrial inspection process. To obtain an extensive dispersion range, the advantages of a simple single-axis structure are combined with the advantages of a large luminous flux of a biaxial structure. Considering large-scale measurement, our sensor uses off-axis rays to limit the illumination path and imaging path to the same optical path structure. At the same time, the field of view is expanded, and a symmetrical structure is adopted to provide a compact optical path and improve space utilization. The simulation and physical system test results shows that the sensor scanning line length is 12.5 mm, and the axial measurement range in the 450 nm to 750 nm band is better than 20 mm. The axial resolution of the detector is ±1 µm combined with the subpixel centroid extraction data processing method, and the maximum allowable tilt angle for specular reflection samples is ±7°. The thicknesses of transparent standard flat glass and the wet collagen membrane are measured. The maximum average error is 1.3 µm, and the relative error is within 0.7%. The constructed sensor is of great significance for rapidly measuring the three-dimensional profile, flatness, and thickness in the fields of transparent biological samples, optics, micromechanics, and semiconductors.

Keywords

Chromatic confocal sensor / optical design / off-axis co-optical path / line scanning

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