Frontiers of Electrical and Electronic Engineering >
Third-order trajectory planning for high accuracy point-to-point motion
Published date: 05 Mar 2009
Copyright
This article studies a third-order trajectory planning method for point-to-point motion. All available instances for third-order trajectory planning are first analyzed. To distinguish those, three criteria are presented relying on trajectory characteristics. Following that, a fast preprocessing approach considering the trajectory as a whole is given based on the criteria constructed and system constraints. Also, the time-optimality of the trajectory is obtained. The relevant formulas are derived with the combination of geometrical symmetry of trajectory and area method. As a result, an accurate algorithm and its implementation procedure are proposed. The experimental results show the effectiveness and precision of the proposed method. The presented algorithm has been applied in semiconductor manufacturing equipment successfully.
Key words: trajectory planning; point-to-point motion; limitation criteria
Haihua MU , Yunfei ZHOU , Sijie YAN , Aiguo HAN . Third-order trajectory planning for high accuracy point-to-point motion[J]. Frontiers of Electrical and Electronic Engineering, 2009 , 4(1) : 83 -87 . DOI: 10.1007/s11460-009-0017-y
1 |
Lewin C. Motion control gets gradually better. Machine Design, 1994, 66: 90–94
|
2 |
Meckl P H, Seering W P. Minimizing residual vibration for point-to-point motion. Journal of Vibration, Acoustics, Stress, and Reliability in Design, 1985, 107: 378–382
|
3 |
Meckl P H, Arestides P B. Optimized s-curve motion profiles for minimum residual vibration.In: Proceedings of the American Control Conference, 1998, 5: 2627–2631
|
4 |
De Roover D, Sperling F B. Point-to-point control of a high accuracy positioning mechanism. In: Proceedings of the American Control Conference, 1997, 3: 1350–1354
|
5 |
Dijkstra B G, Rambaratsingh N J, Scherer C, Bosgra O H, Steinbuch M, Kerssemakers S. Input design for optimal discrete time point-to-point motion of an industrial XY-positioning table. In: Proceedings of the 39th IEEE Conference on Decision and Control, 2000, 1: 901–906
|
6 |
Zhou L, Misawa E A. Vibration suppression control profile generation with both acceleration and velocity constraints. In: Proceedings of the American Control Conference, 2005, 7: 4736–4741
|
7 |
Zhou Y F, Li G Q, Zhou J, Zhou Z D. An algorithm and a new CNC system for surface direct interpolation. Journal of Huazhong University of Science and Technology, 1993, 21(4): 7–12 (in Chinese)
|
8 |
Xu H Y, Chen Y P, Zhou Z D. A 5-axis iterated-interpolation method for arbitrary parabola in a CNC system. Journal of Huazhong University of Science and Technology, 1998, 26(4): 50–52 (in Chinese)
|
9 |
Zhan Y, Zhou Y F, Zhou J. 3D circular arc interpolation for five-axis NC machines. Journal of Huazhong University of Science and Technology, 2000, 28(5): 4–6 (in Chinese)
|
10 |
Xu H Y, Li D, Li D L, Lu Z F. Study of angular interpolations. Journal of HuazhongUniversity of Science and Technology (Nature Science Edition), 2006, 34(6): 58–59 (in Chinese)
|
11 |
Li X Q, Zhou Y F, Li Z Z, Wang Y Z. Algorithms of generation trace making and directly interpolating for spiral bevel gear NC machining. Journal of Huazhong University of Science and Technology (Nature Science Edition), 2002, 30(10): 38–40 (in Chinese)
|
/
〈 | 〉 |