Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surfaces

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Front. Electr. Electron. Eng. ›› 2008, Vol. 3 ›› Issue (4) : 480-487. DOI: 10.1007/s11460-008-0072-9

Application of atmospheric pressure plasma polishing method in machining of silicon ultra-smooth surfaces

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Electr. Electron. Eng., 2008, 3(4): 480‒487 https://doi.org/10.1007/s11460-008-0072-9

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