A MEMS Micro Force Sensor Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure

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Engineering ›› 2023, Vol. 21 ›› Issue (2) : 61-74. DOI: 10.1016/j.eng.2022.06.018

A MEMS Micro Force Sensor Based on a Laterally Movable Gate Field-Effect Transistor (LMGFET) with a Novel Decoupling Sandwich Structure

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Engineering, 2023, 21(2): 61‒74 https://doi.org/10.1016/j.eng.2022.06.018

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