The Development of 3D Atomic Force Microscopy with Magnetically Driven-orthogonal Cantilever Probes

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Engineering ›› 2023, Vol. 24 ›› Issue (5) : 84-93. DOI: 10.1016/j.eng.2022.06.010

The Development of 3D Atomic Force Microscopy with Magnetically Driven-orthogonal Cantilever Probes

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