Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

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Front. Inform. Technol. Electron. Eng ›› 2023, Vol. 24 ›› Issue (7) : 1080-1092. DOI: 10.1631/FITEE.2200255
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Electronically enhancing the long-range nanopositioning accuracy of a Lorentz force actuator

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{{article.zuoZheEn_L}}. {{article.titleEn}}. Front. Inform. Technol. Electron. Eng, 2023, 24(7): 1080‒1092 https://doi.org/10.1631/FITEE.2200255

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