Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces

Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG

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PDF(3124 KB)
Front. Inform. Technol. Electron. Eng ›› 2022, Vol. 23 ›› Issue (5) : 801-809. DOI: 10.1631/FITEE.2100236
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Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces

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Abstract

We propose an inductor-capacitor (LC) wireless passive flexible accelerometer, which eliminates the difficulty in measuring the acceleration on the surface of a bending structure. The accelerometer is composed of a flexible polyimide (PI) substrate and a planar spiral inductance coil (thickness 300 nm), made using micro-electro-mechanical system (MEMS) technology. It can be bent or folded at will, and can be attached firmly to the surface of objects with a bending structure. The principle of radio frequency wireless transmission is used to measure the acceleration signal by changing the distance between the accelerometer and the antenna. Compared with other accelerometers with a lead wire, the accelerometer can prevent the lead from falling off in the course of vibration, thereby prolonging its service life. Through establishment of an experimental platform, when the distance between the antenna and accelerometer was 5 mm, the characterization of the surface of bending structures demonstrated the sensing capabilities of the accelerometer at accelerations of 20-100 m/s2. The results indicate that the acceleration and peak-to-peak output voltage were nearly linear, with accelerometer sensitivity reaching 0.27 mV/(m·s-2). Moreover, the maximum error of the accelerometer was less than 0.037%.

Keywords

Bending structure surfaces / Flexible accelerometer / Micro-electro-mechanical system (MEMS) technology / Wireless non-contact measurement

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Chen LI, Mangu JIA, Yingping HONG, Yanan XUE, Jijun XIONG. Wireless passive flexible accelerometer fabricated using micro-electro-mechanical system technology for bending structure surfaces. Front. Inform. Technol. Electron. Eng, 2022, 23(5): 801‒809 https://doi.org/10.1631/FITEE.2100236

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2022 Zhejiang University Press
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