Low-temperature-curable and photo-patternable benzocyclobutene-derived aggregation-induced emission-active polymer dielectrics

Ziwei Yuan, Meng Xie, Jianlei Qian, Wenjie Fan, Menglu Li, Liao Guo, Yan Sun, Wenxin Fu

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Aggregate ›› 2024, Vol. 5 ›› Issue (3) : 487. DOI: 10.1002/agt2.487
RESEARCH ARTICLE

Low-temperature-curable and photo-patternable benzocyclobutene-derived aggregation-induced emission-active polymer dielectrics

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Abstract

The high curing temperatures required for traditional benzocyclobutene (BCB) materials have posed limitations on their applicability in high-temperature-sensitive fields. To address this challenge, our work focuses on the synthesis of a novel tetraphenylethylene (TPE)-functionalized BCB monomer, TPE–BCB, achieved through the introduction of an ether bond onto the BCB’s four-membered ring via Williamson reaction. TPE–BCB demonstrates remarkable low-temperature curing properties, characterized by a ring-opening peak temperature of 190°C, representing a reduction of 60°C compared to conventional BCBs. Fully cured TPE–BCB resins exhibit exceptional dielectric and mechanical properties, coupled with minimal water absorption. Additionally, the incorporation of TPE with aggregation-induced emission characteristics enhances the resins’ luminescence and photolithographic capabilities. Notably, our TPE–BCB resins achieve impressive photolithography performance with a resolution ratio of up to 10 µm. In contrast to conventional BCB-functionalized resins, TPE–BCB offers the dual advantage of low-temperature curing and luminescence. This development marks a significant step in the advancement of low-temperature curing BCB materials and serves as a pioneering example in the realm of multilayer wafer bonding materials.

Keywords

aggregation-induced emission / benzocyclobutene / low-temperature curing / wafer bonding / Williamson reactions

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Ziwei Yuan, Meng Xie, Jianlei Qian, Wenjie Fan, Menglu Li, Liao Guo, Yan Sun, Wenxin Fu. Low-temperature-curable and photo-patternable benzocyclobutene-derived aggregation-induced emission-active polymer dielectrics. Aggregate, 2024, 5(3): 487 https://doi.org/10.1002/agt2.487

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2024 2024 The Authors. Aggregate published by South China University of Technology; AIE Institute and John Wiley & Sons Australia, Ltd.
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